Abstract: A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

Abstract: A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

Abstract: A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

Abstract: The work of replacing a polishing pad is easily performed, and thermal damage is prevented from occurring in a polishing table. A polishing apparatus 100 includes a polishing table 110 having an attachment surface 110a to which a polishing pad 108 used to polish a substrate 102 is attached. The polishing apparatus 100 also includes a silicone layer 111 provided on the attachment surface 110a of the polishing table 110 and interposed between the polishing table 110 and the polishing pad 108. By interposing the silicone layer 111, it is possible to easily detach and attach the polishing pad 108. In addition, since a heat treatment for coating the silicone layer 111 on the polishing table 110 is performed at a relatively low temperature, it is possible to prevent thermal damage from occurring in the polishing table 110 due to the heat treatment.

Abstract: A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

Abstract: A rolling bearing used in a system including an automotive power train and a peripheral auxiliary equipment of the power train, and in a compressor. The rolling bearing comprises a first race and a second race. A rolling element is rotatably disposed between the first and second races. A film whose main component is a metal selected from the group consisting of nickel and copper has a thickness ranging from 0.1 to 15 ?m. The film is formed on a surface of at least one of the first race, the second race and the rolling element.

Abstract: A rotary member such as a member of a bearing, a rotating member of a transmission or a gear for a motor vehicle, includes a base region of a ferrous base material such as a steel. The rotary member is formed with a hydrogen blocking layer formed in a contact surface for contacting with a mating body in a relative motion. The hydrogen blocking layer includes a concentrated portion formed in the base region and made of a substance lower in hydrogen diffusion coefficient than the base material.

Abstract: An automobile chassis member includes a lithium-iron composite oxide layer as its outermost surface and a surface-modifying layer formed immediately below the lithium-iron composite oxide layer. The surface modifying layer contains as a surface-modifying diffusion element at least nitrogen element bonded with another element in a base material of the automobile chassis member or diffused in the base material. The lithium-iron composite oxide layer is deposited in an amount of from 10 to 1,500 mg/m2 in terms of lithium atoms.

Abstract: A rolling element for a continuously variable transmission, including input and output disks and a power roller interposed between the input and output disks, the power roller including an inner race, an outer race and a plurality of rolling members interposed between the inner and outer races, the input and output disks and the inner race having rolling contact surfaces coming into rolling contact with each other via lubricating oil, the inner and outer races having rolling contact surfaces coming into rolling contact with the rolling members via lubricating oil, and a nickel-based coat formed on at least one of the rolling contact surfaces, the nickel-based coat having a thickness ranging from 0.1 to 20 &mgr;m.

Abstract: A rotary member such as a member of a bearing, a rotating member of a transmission or a gear for a motor vehicle, includes a base region of a ferrous base material such as a steel. The rotary member is formed with a hydrogen blocking layer formed in a contact surface for contacting with a mating body in a relative motion. The hydrogen blocking layer includes a concentrated portion formed in the base region and made of a substance lower in hydrogen diffusion coefficient than the base material.

Abstract: A rolling bearing used in a system including an automotive power train and a peripheral auxiliary equipment of the power train, and in a compressor. The rolling bearing comprises a first race and a second race. A rolling element is rotatably disposed between the first and second races. A film whose main component is a metal selected from the group consisting of nickel and copper has a thickness ranging from 0.1 to 15 &mgr;m. The film is formed on a surface of at least one of the first race, the second race and the rolling element.

Abstract: A rolling element for a continuously variable transmission, including input and output disks and a power roller interposed between the input and output disks, the power roller including an inner race, an outer race and a plurality of rolling members interposed between the inner and outer races, the input and output disks and the inner race having rolling contact surfaces coming into rolling contact with each other via lubricating oil, the inner and outer races having rolling contact surfaces coming into rolling contact with the rolling members via lubricating oil, and a nickel-based coat formed on at least one of the rolling contact surfaces, the nickel-based coat having a thickness ranging from 0.1 to 20 &mgr;m.

Abstract: The present invention is applicable to composite particles for composite dispersion plating used for forming a self-lubricating composite dispersion coating and a method of plating using such composite particles as well as a plating (coating) using the same. The purpose of the invention is to obtain a composite particle for composite dispersion plating which is comprised of a particle with an excellent capability of reducing the friction and a low or very low specific gravity, and a method of plating using such composite particles. In this invention, each of the composite particles includes a friction-reducing mother or core particle (1) encapsulated with shell particles (2) comprised of the same components as a base metal of a composite dispersion plating bath (5). This provides a composite particle for composite dispersion plating which is comprised of a particle with an excellent capability of reducing the friction and a low or very low specific gravity.

Abstract: A slide member having a highly lubricative and highly abrasion-resistant plating layer formed on the sliding surface thereof. The plating layer contains fine particles of graphite selected from flake graphite, vein graphite and/or amorphous graphite in its metallic matrix. The plating layer has a hardness of not less than 550 in terms of Hv and is produced by using a plating solution containing naphthalene sulfanate of formalin condensate as surface active agent. The matrix is preferable to be a Ni—P type metallic matrix and the dispersed fine particles of graphite are preferable having a size of 0.1 to 20 &mgr;m and are contained by 0.1 to 10 wt % relative to the matrix.

Abstract: There is provided a new method of improving properties of the surface of an internal combustion engine valve made from titanium alloy, which comprises; the steps of (a) forming a surface undercoat layer of nickel on a surface of the engine valve; (b) heating the resulting nickel undercoated valve in vacuum or in an atmosphere of inert gas, at the temperature of 450.degree. C. to 600.degree. C., for one to four hours; (c) forming further a three component coat layer comprising nickel, phosphorus and particles of material selected from the group consisting of silicone carbide, silicone nitride, boron nitride, and the combination thereof, on the surface of the nickel undercoat layer; and (d) heating the resulting coat layer formed on the nickel undercoat layer, at the temperature of 350.degree. C. to 550.degree. C., for one to four hours, so as to make the particles of ceramic material uniformly and homogeneously dispersed in said coat layer.

Abstract: There is provided a new structure of an engine valve made from titanium alloy, having three component coat surface layer formed on the surface of the reciprocating shaft thereof, wherein the composition of the three component coat surface layer comprises nickel, phospher and particles of material selected from the group consisting of silicone carbide, silicone nitride, boron nitride, and the combination thereof; said particles are uniformly dispersed in said coat surface layer; and said coat surface layer is formed via a binding layer or directly on the surface of the shaft.

Abstract: A titanium-containing metallic material having a high heat-resistant and abrasion resistant surface is produced by (A) cleaning a titanium-containing metallic material, (B) first plating the cleaned surface of the metallic material with Cu or Ni by a strike or flash plating method, (C) second plating the first plated surface of the Ti-containing material with Ni, Ni-P alloy or a composite material comprising a Ni-P alloy matrix and fine ceramic particles dispersed in the matrix by an electroplating method, (D) non-oxidatively heat treating the second plated Ti-containing material at 450.degree. C.