Patents by Inventor Eiji Horike

Eiji Horike has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for carrying object to be processed
    Patent number: 7371683
    Abstract: A method for carrying an object to be processed used for a processing apparatus which comprises a plurality of process chambers including a specific process chamber for a process in which the object in process is easily contaminated and a carrying mechanism having two picks. The method includes a plurality of carrying steps wherein the object in process is sequentially carried from one chamber to another among the plurality of process chambers. One of the two picks is used in carrying steps up right before carrying the object into the specific process chamber, and the other pick is used in the step of carrying the object into the specific process chamber and the later carrying steps.
    Type: Grant
    Filed: September 19, 2003
    Date of Patent: May 13, 2008
    Assignee: Tokyo Electron Limited
    Inventors: Shigeru Ishizawa, Eiji Horike
  • Method for carrying object to be processed
    Publication number: 20060021575
    Abstract: A method for carrying an object to be processed used for a processing apparatus which comprises a plurality of process chambers including a specific process chamber for a process in which the object in process is easily contaminated and a carrying mechanism having two picks. The method includes a plurality of carrying steps wherein the object in process is sequentially carried from one chamber to another among the plurality of process chambers. One of the two picks is used in carrying steps up right before carrying the object into the specific process chamber, and the other pick is used in the step of carrying the object into the specific process chamber and the later carrying steps.
    Type: Application
    Filed: September 19, 2003
    Publication date: February 2, 2006
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Shigeru Ishizawa, Eiji Horike