Patents by Inventor Eiji Sawa

Eiji Sawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9841385
    Abstract: According to one embodiment, a pattern characteristic detection apparatus for a photomask includes a detection-data creating portion, a reference-data creating portion, an extracting portion, a first area-setting portion, a detecting portion and an collecting portion. The detection-data creating portion is configured to create detection data on the basis of an optical image of a pattern formed on a photomask. The reference-data creating portion is configured to create reference data of the pattern. The extracting portion is configured to extract a pattern for pattern characteristic detection and positional information of the extracted pattern. The first area-setting portion is configured to set an area where pattern characteristics are to be detected, and configured to extract a target pattern. The detecting portion is configured to detect pattern characteristics of the target pattern within the area. In addition, the collecting portion is configured to collect the detected pattern characteristics.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: December 12, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiromu Inoue, Hiroyuki Ikeda, Eiji Sawa
  • Patent number: 9406117
    Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: August 2, 2016
    Assignee: NuFlare Technology, Inc.
    Inventors: Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa, Kentaro Okuda, Hiroyuki Ikeda, Hiromu Inoue, Hiroshi Tsukada
  • Publication number: 20150193918
    Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.
    Type: Application
    Filed: March 23, 2015
    Publication date: July 9, 2015
    Applicants: NuFlare Technology, Inc., KABUSHIKI KAISHA TOSHIBA
    Inventors: Takanao TOUYA, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa, Kentaro Okuda, Hiroyuki Ikeda, Hiromu Inoue, Hiroshi Tsukada
  • Patent number: 9036896
    Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: May 19, 2015
    Assignees: NuFlare Technology, Inc., Kabushiki Kaisha Toshiba
    Inventors: Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa, Kentaro Okuda, Hiroyuki Ikeda, Hiromu Inoue, Hiroshi Tsukada
  • Patent number: 8679370
    Abstract: A conductive coating is described, suitable for coating a developer, charge or transfer roller in a developing apparatus to give a charge providing layer. The coating comprises a conductive polymer in a matrix. A roller is also described, suitable for a developing apparatus comprising, from the center to the periphery, a conductive mandrel, a conductive elastic base layer and a charge providing layer.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: March 25, 2014
    Assignee: Ten Cate Enbi International B.V.
    Inventors: John Jansen, Tsuyoshi Tokiwa, Eiji Sawa
  • Patent number: 8419977
    Abstract: A conductive coating is described, suitable for coating a developer, charge or transfer roller in a developing apparatus to give a charge providing layer. The coating comprises a conductive polymer in a matrix. A roller is also described, suitable for a developing apparatus comprising, from the center to the periphery, a conductive mandrel, a conductive elastic base layer and a charge providing layer.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: April 16, 2013
    Assignee: Ten Cate Enbi International B.V
    Inventors: John Jansen, Tsuyoshi Tokiwa, Eiji Sawa
  • Publication number: 20110255770
    Abstract: A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.
    Type: Application
    Filed: April 8, 2011
    Publication date: October 20, 2011
    Applicants: KABUSHIKI KAISHA TOSHIBA, NuFlare Technology, Inc.
    Inventors: Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa, Kentaro Okuda, Hiroyuki Ikeda, Hiromu Inoue, Hiroshi Tsukada
  • Patent number: 7962077
    Abstract: Developing roller comprising a conductive mandrel with at least an elastic conductive base layer and a charge providing layer. The base layer is located closer to the mandrel than the charge providing layer. The base layer is roughened before the charge providing layer is applied to the base layer.
    Type: Grant
    Filed: April 13, 2009
    Date of Patent: June 14, 2011
    Assignee: Ten Cate Enbi International B.V.
    Inventors: John Jansen, Tsuyoshi Tokiwa, Eiji Sawa
  • Publication number: 20110058729
    Abstract: According to one embodiment, a pattern characteristic detection apparatus for a photomask includes a detection-data creating portion, a reference-data creating portion, an extracting portion, a first area-setting portion, a detecting portion and an collecting portion. The detection-data creating portion is configured to create detection data on the basis of an optical image of a pattern formed on a photomask. The reference-data creating portion is configured to create reference data of the pattern. The extracting portion is configured to extract a pattern for pattern characteristic detection and positional information of the extracted pattern. The first area-setting portion is configured to set an area where pattern characteristics are to be detected, and configured to extract a target pattern. The detecting portion is configured to detect pattern characteristics of the target pattern within the area. In addition, the collecting portion is configured to collect the detected pattern characteristics.
    Type: Application
    Filed: August 17, 2010
    Publication date: March 10, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiromu Inoue, Hiroyuki Ikeda, Eiji Sawa
  • Publication number: 20090257789
    Abstract: Developing roller comprising a conductive mandrel with at least an elastic conductive base layer and a charge providing layer. The base layer is located closer to the mandrel than the charge providing layer. The base layer is roughened before the charge providing layer is applied to the base layer.
    Type: Application
    Filed: April 13, 2009
    Publication date: October 15, 2009
    Inventors: John JANSEN, Tsuyoshi Tokiwa, Eiji Sawa
  • Publication number: 20090257790
    Abstract: A conductive coating is described, suitable for coating a developer, charge or transfer roller in a developing apparatus to give a charge providing layer. The coating comprises a conductive polymer in a matrix. A roller is also described, suitable for a developing apparatus comprising, from the centre to the periphery, a conductive mandrel, a conductive elastic base layer and a charge providing layer.
    Type: Application
    Filed: April 15, 2009
    Publication date: October 15, 2009
    Inventors: John Jansen, Tsuyoshi Tokiwa, Eiji Sawa
  • Patent number: 7466854
    Abstract: A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.
    Type: Grant
    Filed: August 5, 2005
    Date of Patent: December 16, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Eiji Sawa, Hiromu Inoue
  • Publication number: 20050265595
    Abstract: A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.
    Type: Application
    Filed: August 5, 2005
    Publication date: December 1, 2005
    Inventors: Eiji Sawa, Hiromu Inoue
  • Patent number: 6965687
    Abstract: A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: November 15, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Eiji Sawa, Hiromu Inoue
  • Patent number: 6888958
    Abstract: The difference data between the real patter data Sij, and a 5×5 window with a noticed pixel in the center and the design pattern data Rij obtained by the design pattern data of the window being shifted in a plurality of directions with respect to the design pattern data Rij is found by a shift direction operation section, and the design pattern data in the direction in which the total of the pixels is minimum is selected from the difference data by a selection section, the difference between the central pixels Sij, Qij of the selected design pattern data and the central pixels Sij, Qij of the windows of the real pattern data is found by a difference operation section, and the difference and a threshold are compared in a defect judgement section, and thereby the pattern inspection of the object is carried out.
    Type: Grant
    Filed: March 29, 2000
    Date of Patent: May 3, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Eiji Sawa, Hiromu Inoue, Satoshi Imi
  • Patent number: 6875884
    Abstract: Urea and thiourea derivatives inhibit cell function of the chemokine receptor CCR-3. These compounds offer an effective means for treating a range of diseases thought to be mediated by the CCR-3 receptor. A variety of useful urea and thiourea derivatives can be synthesized using liquid and solid phase synthesis protocols.
    Type: Grant
    Filed: July 28, 2000
    Date of Patent: April 5, 2005
    Assignee: Kirin Beer Kabushiki Kaisha
    Inventors: Janak Padia, Michael Hocker, Tsuyoshi Nishitoba, Hirohi Ohashi, Eiji Sawa
  • Patent number: 6691439
    Abstract: A full-shrink labeled container has an opening sealed with a plug provided with a pull-up part for unsealing, a body to which a shrink label having a heat shrinkability is applied, and a neck having the circumference shorter than that of the body. The shrink label covers the container from the lower end part to the upper end part, also the pull-up part, and is formed with tear-off means capable of exposing the pull-up part.
    Type: Grant
    Filed: October 5, 2000
    Date of Patent: February 17, 2004
    Assignees: Asahi Breweries, Ltd., Fuji Seal, Inc.
    Inventors: Takashi Miyashita, Takeshi Haraya, Kazunori Kunitake, Kazuo Okada, Eiji Sawa, Makoto Fukuhara, Tetsuo Hata
  • Patent number: 6435854
    Abstract: The invention is an apparatus for mixing and injection molding thermosetting polyurethane. The invention involves using a premixer comprising of a series of specially designed premixing chambers, one or more static, rather than dynamic, mixers, and a specially designed dual-path mixer. After the material is mixed it is pumped into an injector, and then deposited into a mold. This entire process is accomplished in an airtight environment. The mold into which the material is pumped is attached to a vacuum that decreases the chances of any air bubbles being trapped inside the mold. New features of the apparatus include a dual-path mixer and a newly designed premixing chamber.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: August 20, 2002
    Inventors: Eiji Sawa, Kenichi Kawamoto, Gary L. Raikea
  • Publication number: 20020028013
    Abstract: A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.
    Type: Application
    Filed: June 20, 2001
    Publication date: March 7, 2002
    Inventors: Eiji Sawa, Hiromu Inoue
  • Patent number: 5878313
    Abstract: A developing roller (1) includes a highly conductive shaft (2) and a conductive elastic layer (3). When the developing roller carring a one-component developer thereon comes in contact with or in proximity to an image forming body, the developer is supplied from the roller to a surface of the image forming body, thereby forming a visible image on the image forming body surface. The elastic layer (3) has applied to its surface a resin component having an elongation at rupture of less than 10% as measured according to JIS K7113. The developing roller ensures that images of high quality are reproduced without a drop of image density over a long period of time.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: March 2, 1999
    Assignee: Bridgestone Corporation
    Inventors: Koji Takagi, Yoshio Takizawa, Eiji Sawa