Abstract: A force sensor includes a pressure-receiving member; a sensor substrate including a displaceable portion to be displaced under a load received by the pressure-receiving member, and piezoelectric resistors configured to electrically detect an amount of displacement of the displaceable portion; a base substrate having a sensor-mounting surface, and including electrical wiring portions electrically connected to the piezoelectric resistors; and a package substrate having a substrate-mounting surface and a pad surface provided with pad electrodes. The pressure-receiving member, the sensor substrate, and the base substrate are stacked in a normal direction to the substrate-mounting surface. When seen in the normal direction, an entirety of the displaceable portion is located within the pressure-receiving member. The pad surface is provided with, when seen in the normal direction, a fixing terminal at least a part of which overlaps at least a part of a first area that coincides with the pressure-receiving member.

Abstract: A load sensor unit according to an aspect of the present invention includes an operating part movable forward and backward in a first direction; a load sensor that has a pressure receiving part and outputs a signal according to a load received in the first direction by the pressure receiving part; a linking part that has one end part linked to the operating part and an other end part that causes the pressure receiving part to operate and is movable forward and backward in the first direction in synchronization with the operating part; and an elastic member that gives biasing force to the other end part of the linking part and gives an initial load to the pressure receiving part through the other end part. This can prevent a load sensor from being broken by an overload with a simple configuration and fully demonstrate detection accuracy of the load sensor.

Abstract: A Z detection unit includes magnetoresistive elements provided on inclined side surfaces of Z detection recesses. An X detection unit includes magnetoresistive elements provided on inclined side surfaces of X detection recesses. A Y detection unit includes magnetoresistive elements provided on inclined side surfaces of Y detection recesses. Directions of fixed magnetization of fixed magnetic layers included in the magnetoresistive elements are set to directions shown by arrows with solid lines.

Abstract: A load sensor unit according to an aspect of the present invention includes an operating part movable forward and backward in a first direction; a load sensor that has a pressure receiving part and outputs a signal according to a load received in the first direction by the pressure receiving part; a linking part that has one end part linked to the operating part and an other end part that causes the pressure receiving part to operate and is movable forward and backward in the first direction in synchronization with the operating part; and an elastic member that gives biasing force to the other end part of the linking part and gives an initial load to the pressure receiving part through the other end part. This can prevent a load sensor from being broken by an overload with a simple configuration and fully demonstrate detection accuracy of the load sensor.

Abstract: A magnetic field detection device includes a Z-direction detection unit with magnetoresistive elements provided on inclined side surfaces of Z-direction detection recesses; an X-direction detection unit includes magnetoresistive elements provided on inclined side surfaces of X-direction detection recesses and a Y-detection unit includes magnetoresistive elements provided on inclined side surfaces of Y-direction detection recesses, each of the detection units having a bridge circuit comprising two element lines connected in parallel, each element line comprising two of the magnetoresistive elements connected in series.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a circuit board including a circuit configured to process the signal output from the detection element; and a lid portion which is attached onto the frame portion and has a through-hole, in which a functional film having higher hydrophobicity than a surface of the lid portion is provided on at least an inner surface of the through-hole in the lid portion.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a frame configured to be attached to the edge of the cavity package and has a surface more smoothed than the edge and an opening, a contact prevention member configured to be attached to the frame, and a pressure introducing hole having a diameter smaller than a diameter of the opening at a position overlapping the opening, and a gel agent configured to be provided in the recess and the opening, in which the gel agent is provided to be separated from an edge of the pressure introducing hole on the frame side.

Abstract: A Z detection unit includes magnetoresistive elements provided on inclined side surfaces of Z detection recesses. An X detection unit includes magnetoresistive elements provided on inclined side surfaces of X detection recesses. A Y detection unit includes magnetoresistive elements provided on inclined side surfaces of Y detection recesses.

Abstract: A Z detection unit includes magnetoresistive elements provided on inclined side surfaces of Z detection recesses. An X detection unit includes magnetoresistive elements provided on inclined side surfaces of X detection recesses. A Y detection unit includes magnetoresistive elements provided on inclined side surfaces of Y detection recesses. Directions of fixed magnetization of fixed magnetic layers included in the magnetoresistive elements are set to directions shown by arrows with solid lines.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.

Abstract: An input device includes a position detection sensor capable of detecting an input operation position of an operation body on an operation surface, a load detection sensor capable of detecting a load in the input operation position, and a control unit capable of executing offset calibration to correct an offset of an output of the load detection sensor based on input operation information resulting from an output of the position detection sensor.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a circuit board including a circuit configured to process the signal output from the detection element; and a lid portion which is attached onto the frame portion and has a through-hole, in which a functional film having higher hydrophobicity than a surface of the lid portion is provided on at least an inner surface of the through-hole in the lid portion.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a frame configured to be attached to the edge of the cavity package and has a surface more smoothed than the edge and an opening, a contact prevention member configured to be attached to the frame, and a pressure introducing hole having a diameter smaller than a diameter of the opening at a position overlapping the opening, and a gel agent configured to be provided in the recess and the opening, in which the gel agent is provided to be separated from an edge of the pressure introducing hole on the frame side.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a cover member attached to the edge of the cavity package and to be provided with a pressure introducing hole having a diameter smaller than a diameter of an opening of the recess in a plan view at a position overlapping the recess, and a gel agent configured to be provided in the recess, in which an exhaust portion is provided at the cover member at least on the recess side, the exhaust portion being capable of discharging air in the recess to the outside when the gel agent is injected from the pressure introducing hole into the recess, and the exhaust portion is filled with the gel agent.

Abstract: A load detector and an electronic unit using load detectors include a load sensor having a projective pressure receiving part, a case in which the load sensor is placed with the pressure receiving part facing toward the upper surface of the case, and an elastic body placed on the same side as the upper surface of the load sensor, the elastic body configured to receive a load and press the load sensor in its height direction.

Abstract: A magnetic sensor for detecting the position of a magnet in an X direction includes two magnetic sensor elements which are disposed to be spaced apart from each other in a Y direction and are disposed to face the magnet in a Z direction, in which a soft magnetic body is provided to be located between the magnet and the two magnetic sensor elements and to be located between the two magnetic sensor elements, the two magnetic sensor elements are provided in a range in which magnetic flux which is generated from the magnet saturates magnetization of free magnetic layers of the two magnetic sensor elements, magnetization directions of fixed magnetic layers of the two magnetic sensor elements are the same as each other, and a bridge circuit is configured with the two magnetic sensor elements.

Abstract: An input device includes a capacitance type touch panel sensor configured to detect positional coordinates of multiple pressing points that are simultaneously pressed on an operation face, load detection sensors configured to detect barycentric coordinates of and a barycentric load on the pressing points, and a controller configured to calculate loads on the pressing points on the basis of the positional coordinates of, the barycentric coordinates of, and the barycentric load on the pressing points.

Abstract: A load detector and an electronic unit using load detectors include a load sensor having a projective pressure receiving part, a case in which the load sensor is placed with the pressure receiving part facing toward the upper surface of the case, and an elastic body placed on the same side as the upper surface of the load sensor, the elastic body configured to receive a load and press the load sensor in its height direction.

Abstract: A magnetic sensor for detecting the position of a magnet in an X direction includes two magnetic sensor elements which are disposed to be spaced apart from each other in a Y direction and are disposed to face the magnet in a Z direction, in which a soft magnetic body is provided to be located between the magnet and the two magnetic sensor elements and to be located between the two magnetic sensor elements, the two magnetic sensor elements are provided in a range in which magnetic flux which is generated from the magnet saturates magnetization of free magnetic layers of the two magnetic sensor elements, magnetization directions of fixed magnetic layers of the two magnetic sensor elements are the same as each other, and a bridge circuit is configured with the two magnetic sensor elements.