Abstract: A defect inspection apparatus for inspecting a presence of a defect on an object includes: a first input unit which inputs a wavelength characteristic of each of a plurality of samples with wavelength variation of an illumination light for inspection; a second input unit which inputs an inspection condition which an inspector voluntary sets for each sample as a teaching signal; a third input unit which inputs a wavelength characteristic of the object with the wavelength variation of the illumination light; a learning unit which learns and stores a relationship between the inputted wavelength characteristic of each sample and the inputted inspection condition for each sample as a learning, and determines an inspection condition for the object based on the inputted wavelength characteristic of the object and the learning; and a defect detector witch detects a defect of the object based on the determined inspection condition of the object.

Abstract: In a visual inspection apparatus for visual inspection of an object, a plurality of monochrome images obtained from an object are used to prepare a plurality of computed color images. The computed color images are switchingly displayed on a color display for visual inspection.

Abstract: A defect inspecting apparatus for inspecting a defect on an object to be inspected on the basis of comparison between a pattern at a first position and a pattern at a second position on the object to be inspected having repeated patterns.