Abstract: A liquid discharge head unit includes a liquid discharge head that has a first detection resistor that is provided to correspond to a first piezoelectric element group, a second detection resistor that is provided to correspond to a second piezoelectric element group, a power supply circuit that causes a current to flow through the first detection resistor and the second detection resistor, a voltage detection circuit that detects a voltage, and a switching circuit that is configured to switch between a first state in which the voltage detection circuit is configured to detect a voltage generated in the first detection resistor due to the current flowing from the power supply circuit and a second state in which the voltage detection circuit is configured to detect a voltage generated in the second detection resistor due to the current flowing from the power supply circuit.

Abstract: A distance between the first circuit and the second circuit is a first distance, a distance between the first circuit and the temperature detection circuit is a second distance longer than the first distance, and a distance between the second circuit and the temperature detection circuit is a third distance longer than the first distance.

Abstract: when one position where a distance in the second direction to the partition wall located at a nearest position in the second direction is long is assumed as a first position, and the other position where the distance is short is assumed as a second position, both the piezoelectric body and the vibration plate are provided at the first position and the second position, and a thickness of the vibration plate at the second position is smaller than a thickness of the vibration plate at the first position.

Abstract: A liquid ejecting head includes a piezoelectric device including a first electrode, a second electrode, and a piezoelectric layer, a vibration plate that is deformed when the piezoelectric device is driven, a pressure chamber plate including a pressure chamber whose volume is changed by deformation of the vibration plate, a wiring board, an individual lead electrode through which the wiring board and the first electrode are electrically coupled to each other, a common lead electrode through which the wiring board and the second electrode are electrically coupled to each other, and a resistance wire electrically coupled to the wiring board and used to determine temperature in the pressure chamber.

Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

Abstract: A liquid ejecting head includes: a first pressure chamber to which a first liquid is supplied; a first drive element that applies pressure to the first liquid in the first pressure chamber; a second pressure chamber to which a second liquid is supplied; a second drive element that applies pressure to the second liquid in the second pressure chamber; a nozzle channel which has one end communicating with the first pressure chamber and another end communicating with the second pressure chamber and in which the first liquid supplied from the first pressure chamber and the second liquid supplied from the second pressure chamber are mixed; and a nozzle that is provided in the nozzle channel and ejects a mixture of the first liquid and the second liquid.

Abstract: The terminal portion extends onto a surface of the protrusion portion from part positioned in the second layer and corresponding to the second portion, and part on the surface of the protrusion portion contacts an electrode of the drive element.

Abstract: A length of a path between the input section and the third energy generation element in the wiring section is shorter than a length of a path between the input section and the first energy generation element in the wiring section and shorter than a length of a path between the input section and the second energy generation element in the wiring section.

Abstract: A liquid ejecting head includes: a pressure chamber; a piezoelectric element that generates energy for applying pressure to an ink in the pressure chamber; a nozzle channel that extends in the X-axis direction and communicates with a nozzle for ejecting the ink; a supply communication channel which enables the pressure chamber and the nozzle channel to communicate with each other; a discharge communication channel which communicates with the nozzle channel; a wiring substrate electrically coupled to a drive circuit that drives the piezoelectric element; and a wiring section that electrically couples the wiring substrate and the piezoelectric element, in which, as viewed in the Z-axis direction orthogonal to the X-axis direction, the wiring section is provided at a position at which the wiring section overlaps the nozzle channel, and the wiring section extends in the ±Q direction, which differs from the X-axis direction.

Abstract: A liquid ejecting head includes: a first pressure chamber that applies pressure to a liquid; a second pressure chamber that applies pressure to the liquid; a nozzle channel that extends in a first direction and includes a nozzle that ejects the liquid; a first communication channel that extends in a second direction crossing the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other; a second communication channel that extends in the second direction and enables the second pressure chamber and the nozzle channel to communicate with each other; and a first branch channel that has a portion extending in the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other through a path different from a path of the first communication channel.

Abstract: A liquid ejecting head includes a diaphragm that constitutes a part of a wall surface of a pressure chamber in which a liquid is filled, and a piezoelectric element that vibrates the diaphragm, in which the piezoelectric element includes a first electrode and a second electrode, and a piezoelectric layer including a first portion located between the first electrode and the second electrode and a second portion not overlapping at least one of the first electrode and the second electrode in plan view, a first surface at an opposite side of the first portion from the diaphragm and a second surface at an opposite side of the second portion from the diaphragm are different in position in a laminate direction of the first electrode, the piezoelectric layer, and the second electrode, and a second film thickness of the second portion is larger than a first film thickness of the first portion.

Abstract: a plurality of wall surfaces that constitute inner walls of the pressure compartment includes a surface of the recessed portion and the first wall surface, and an angle formed by the first surface and the first wall surface is greater than 90° and less than 180°.

Abstract: A piezoelectric device (an actuator unit) includes the following: a first substrate (a pressure chamber forming substrate, a diaphragm) having a piezoelectric layer and a first wiring conductor (a top electrode layer) that is at least partially stacked on the piezoelectric layer; and a second substrate (a sealing substrate) having a second wiring conductor (a bottom wiring conductor) that faces and is separated from the first wiring conductor (a top electrode layer) and to which an electrical signal different from an electrical signal that is applied to the first wiring conductor (a top electrode layer) is applied. At least one of the first wiring conductor (a top electrode layer) and the second wiring conductor (a bottom wiring conductor) is at least partially covered with an electrically insulating protective layer.

Abstract: Provided is a piezoelectric device including: a substrate (10) on which a plurality of recesses (12) are provided; a vibrating plate (50) which is provided on one surface side of the substrate; and a piezoelectric element (300) which is provided over the vibrating plate (50) and on which a first electrode (60), a piezoelectric layer (70), and a second electrode (80) are laminated from the substrate (10) side, in which the first electrode (60) is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (12), and the piezoelectric layer (70) is extended to the outer side of the first electrode (60) in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess (12) in the parallel arrangement direction, the vibrating plate (50) contains a zirconium oxide layer (52), and when an area of the zirconium oxide layer (52) corres

Abstract: when one position where a distance in the second direction to the partition wall located at a nearest position in the second direction is long is assumed as a first position, and the other position where the distance is short is assumed as a second position, both the piezoelectric body and the vibration plate are provided at the first position and the second position, and a thickness of the vibration plate at the second position is smaller than a thickness of the vibration plate at the first position.

Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

Abstract: A piezoelectric actuator includes: a diaphragm plate; a first electrode provided on or over the diaphragm plate; a piezoelectric substance layer provided on or over the first electrode; and a second electrode provided on or over the piezoelectric substance layer; wherein the piezoelectric substance layer includes a plurality of active portions sandwiched between the first electrode and the second electrode, either one of the first electrode and the second electrode is an individual electrode provided individually for each of the plurality of active portions, the other of the first electrode and the second electrode is a common electrode that is common to the plurality of active portions, and lead-out wiring is multiple-connected to the individual electrode.

Abstract: A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.

Abstract: A length of a path between the input section and the third energy generation element in the wiring section is shorter than a length of a path between the input section and the first energy generation element in the wiring section and shorter than a length of a path between the input section and the second energy generation element in the wiring section.

Abstract: A liquid discharging head includes a first flow path member comprising a first flow path and a pressure chamber; a second flow path member stacked on the first flow path member and comprising a second flow path; a wiring substrate comprising a connection terminal for electrically connected to a driving element to generate a pressure change in the pressure chamber; and a circulation flow path for circulating the liquid through the pressure chamber. A surface of the first flow path member includes a first region which is stacked on the second flow path member via the wiring substrate and a second region which is stacked on the second flow path member without the wiring substrate. The first flow path and the second flow path are in communication with each other in the second region so as to be the circulation flow path.