Abstract: A speech communication device includes microphones configured with: microphones M1 and M2 disposed at positions which are axisymmetric with a centerline in a width direction of a housing as a symmetric axis; and a microphone M3 disposed at a position which is on the centerline and closer to a speaker than the microphones M1 and M2 are. The speech communication device is further equipped with: a sound processor which includes: a beam former which is connected to the microphones M1 and M2 and forms a bidirectionality in which directionality is strong in two directions each perpendicular to the centerline and is weak in two directions each along the centerline; and an echo cancel unit which is connected to the beam former and the microphone M3 and removes a sound signal having been output from the microphone M3 from a sound signal having been output from the beam former.

Abstract: Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism includes a hand portion provided with a flange insertion portion. The substrate processing apparatus is provided with at least two placing tables arranged side by side in a first horizontal direction. The method includes moving the placing table to the conveyance place in the second horizontal direction by a predetermined distance; sliding the hand portion from a side of a placing table neighboring to the placing table in the first horizontal direction such that the flange portion is inserted into the flange inserting portion; and conveying the storage container from the placing table to the conveyance place through the hand portion.

Abstract: A speech communication device includes microphones configured with: microphones M1 and M2 disposed at positions which are axisymmetric with a centerline in a width direction of a housing as a symmetric axis; and a microphone M3 disposed at a position which is on the centerline and closer to a speaker than the microphones M1 and M2 are. The speech communication device is further equipped with: a sound processor which includes: a beam former which is connected to the microphones M1 and M2 and forms a bidirectionality in which directionality is strong in two directions each perpendicular to the centerline and is weak in two directions each along the centerline; and an echo cancel unit which is connected to the beam former and the microphone M3 and removes a sound signal having been output from the microphone M3 from a sound signal having been output from the beam former.

Abstract: Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism includes a hand portion provided with a flange insertion portion. The substrate processing apparatus is provided with at least two placing tables arranged side by side in a first horizontal direction. The method includes moving the placing table to the conveyance place in the second horizontal direction by a predetermined distance; sliding the hand portion from a side of a placing table neighboring to the placing table in the first horizontal direction such that the flange portion is inserted into the flange inserting portion; and conveying the storage container from the placing table to the conveyance place through the hand portion.

Abstract: A flat panel speaker has a construction in which an actuator 10 vibrates a panel to radiate sound, the panel being held at a peripheral portion thereof on a frame by gaskets, wherein the gasket provided at a position opposite from a position at which the actuator is placed has a higher hardness than that of the gasket provided at another position. The side on which the gasket having the higher hardness is placed is a substantially fixed end to facilitate vibration of the panel, thereby improving sound quality.