Patents by Inventor Eileen V. Clarke

Eileen V. Clarke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hardware/software implementation for multipass E-beam mask writing
    Patent number: 5621216
    Abstract: A process smooths the edges of rectangles written by an E-beam lithography system to improve critical dimension (CD) control in these shapes in the preparation of X-ray masks. The CD tolerances of X-ray masks are improved without the usual postprocessing costs normally associated with multipass solutions, thereby saving time and money when multipass writing is used in X-ray lithography. Two enhancements are provided to an X-ray mask maker that allow use of the same E-beam drive code for each exposure of a multipass write operation.
    Type: Grant
    Filed: April 26, 1996
    Date of Patent: April 15, 1997
    Assignee: International Business Machines Corporation
    Inventors: Eileen V. Clarke, William A. Enichen, John G. Hartley