Abstract: An image pickup apparatus that is capable of improving measurement accuracy and measurement workability of an optical measurement apparatus, an optical measurement apparatus including the image pickup apparatus, and a measurement system. An image pickup apparatus according to an embodiment includes a base section, a beam splitter, and an image pickup section. The base is configured to detachably attach to an optical measurement apparatus including an optical projection system configured to project an image of a subject on a screen. The beam splitter is disposed on an optical axis of the optical projection system upon attachment of the base to the optical measurement apparatus. The image pickup circuitry includes an image pickup device configured to receive light generated through splitting at the beam splitter and is configured to take an image of the subject upon attachment of the base.

Abstract: A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.

Abstract: An image pickup apparatus that is capable of improving measurement accuracy and measurement workability of an optical measurement apparatus, an optical measurement apparatus including the image pickup apparatus, and a measurement system. An image pickup apparatus according to an embodiment includes a base section, a beam splitter, and an image pickup section. The base is configured to detachably attach to an optical measurement apparatus including an optical projection system configured to project an image of a subject on a screen. The beam splitter is disposed on an optical axis of the optical projection system upon attachment of the base to the optical measurement apparatus. The image pickup circuitry includes an image pickup device configured to receive light generated through splitting at the beam splitter and is configured to take an image of the subject upon attachment of the base.

Abstract: An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.

Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

Abstract: A focus detection unit to adjust a focal point of an image, of an object, formed by an optical system includes a first output section, a second output section, and a projection optical system. The first output section includes a first light modulation element configured to generate a first pattern image based on incident light and is configured to output the generated first pattern image. The second output section includes a second light modulation element configured to generate a second pattern image based on incident light and is configured to output the generated second pattern image. The projection optical system is configured to project the output first pattern image and the output second pattern image such that the output first pattern image and the output second pattern image have a predetermined positional relationship at an in-focus position of the optical system.

Abstract: An LED ring light including a holding frame having a generally annular shape in a plan view and an aperture into which an objective lens can be inserted around a center of the holding frame; an LED substrate held inside the holding frame in a generally frusto-conical shape; and a plurality of LEDs arranged on an inner circumferential surface of the LED substrate. The LED substrate is divided at a plurality of locations in a circumferential direction of the inner circumferential surface of the holding frame by arranging a plurality of substrates side by side.

Abstract: An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.

Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.

Abstract: A focus detection unit to adjust a focal point of an image, of an object, formed by an optical system includes a first output section, a second output section, and a projection optical system. The first output section includes a first light modulation element configured to generate a first pattern image based on incident light and is configured to output the generated first pattern image. The second output section includes a second light modulation element configured to generate a second pattern image based on incident light and is configured to output the generated second pattern image. The projection optical system is configured to project the output first pattern image and the output second pattern image such that the output first pattern image and the output second pattern image have a predetermined positional relationship at an in-focus position of the optical system.

Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.

Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. In addition, a light reflection prevention structure or a diffusion structure is provided to the bottom surface of the probe cover. Light reflected from the work piece is prevented from reflecting off the bottom surface by the reflection prevention structure, or the reflected light is diffused by the diffusion structure. Accordingly, an occurrence of an erroneous value in received light distribution due to second order reflected light can be inhibited.

Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

Abstract: A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.

Abstract: An optical unit includes: an objective lens; an imaging lens that is arranged in the optical axis of the objective lens and images a light beam output from the objective lens; a plurality of afocal optical systems that are arranged between the objective lens and the imaging lens and have different afocal magnifications; and a switch that shifts either one of the afocal optical systems to be aligned with the optical axis of the objective lens.

Abstract: Luminous intensity and chromaticity of each luminescent light source are measured for an impressed current value, a mixing ratio of intensities of lights emitted from luminescent light sources required for synthesizing lighting intensity with the preset chromaticity at the luminous intensity instructed by an instruction value is computed with a theoretical equation for computing changes in chromaticity correlating to changes in luminous intensities of the luminescent light sources for color synthesis (ST33), luminous intensities of each luminous light source for generating a luminous intensity instructed by an instruction value from a mixing ratio are computed (ST34), and the impressed current value required for making each luminous light source emit light at the luminous intensity is read out from the characteristics of luminous light sources (ST35).

Abstract: Luminous intensity and chromaticity of each luminescent light source are measured for an impressed current value, a mixing ratio of intensities of lights emitted from luminescent light sources required for synthesizing lighting intensity with the preset chromaticity at the luminous intensity instructed by an instruction value is computed with a theoretical equation for computing changes in chromaticity correlating to changes in luminous intensities of the luminescent light sources for color synthesis (ST33), luminous intensities of each luminous light source for generating a luminous intensity instructed by an instruction value from a mixing ratio are computed (ST34), and the impressed current value required for making each luminous light source emit light at the luminous intensity is read out from the characteristics of luminous light sources (ST35).