Patents by Inventor Eisuke NONAKA

Eisuke NONAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210205949
    Abstract: Provided are a double-side polishing apparatus and a double-side polishing method which can terminate double-side polishing of a workpiece so that the workpiece will have a desired shape even when double-side polishing of the workpiece is performed repeatedly. The control means determines, from a reference time point determined based on the amplitude of the change of the temperature of the carrier plate, an offset time for the next batch during which additional double-side polishing is performed; and terminates double-side polishing after a lapse of the determined offset time from the reference time point. The offset time is determined based on a predicted value of the shape index of the workpiece in the next batch, predicted from the actual value of the shape index of the workpiece having been double-side polished in one or more previous batches and from difference of the offset time between batches.
    Type: Application
    Filed: February 21, 2019
    Publication date: July 8, 2021
    Applicant: SUMCO CORPORATION
    Inventors: Mami KUBOTA, Eisuke NONAKA, Tetsurou TANIGUCHI, Keiichi TAKANASHI