Abstract: After a CrSiN film and a TiW film are formed on a substrate through an intermediate insulating layer, a mask pattern is formed on the TiW film. Then a two-step dry etching treatment is performed to etch the TiW film and the CrSiN film into a specific shape. Specifically, first the TiW film is selectively etched under conditions including a large content of fluorine radicals. Then the CrSiN film is selectively etched under conditions including a large content of oxygen radicals. Accordingly, a thin film resistor can be formed with high accuracy with respect to the mask pattern.

Abstract: An electromagnetic valve comprises yoke means having a pair of projecting elements which protrude outwardly in the mounting side of said valve, one of said projecting elements having at its outward end a pawl which is outwardly bent, and the other projecting element having its outer end portion which is inwardly bent substantially at right angle, said outer end portion having a threaded aperture for bolting said yoke means to a mounting bracket, said pawl in said one projecting element being engaged by an opening which is formed in said mounting bracket.

Abstract: A solenoid valve for opening and closing a fluid passage formed therein by the movement of a movable core in which a coil is wound around a resin bobbin and a stator core is fixed at one end portion of a center hole of the bobbin. A magnetic path plate having a ring-shaped portion and a flanged portion is insert-moulded in a body of the bobbin with a part of the flanged portion protruding radially to the outside of the body of the bobbin. The magnetic path plate is disposed such that the inner surface of the ring-shaped portion surrounds the outer surface of the moving core and the ring-shaped portion is concentric with the center hole of the bobbin. Since the protruding flanged portion is connected mechanically to one end of a yoke, a magnetic path is provided between the movable core and the yoke through the magnetic path plate with a reduced reluctance.