Patents by Inventor Eizi Takagi

Eizi Takagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4707012
    Abstract: A vacuum holder which comprises a chuck provided with a recess facing a silicon wafer, a suction pipe for sucking air in the vicinity of the recess, and four separately-positioned holes penetrating the chuck in communication with the inner space of the recess.
    Type: Grant
    Filed: November 3, 1986
    Date of Patent: November 17, 1987
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Eizi Takagi