Patents by Inventor Eizo Ohya

Eizo Ohya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
    Patent number: 7889320
    Abstract: The present invention provides a variable slit apparatus, which can rapidly change the shape of the slit width of the illumination light while finely controlling the shape of the slit-shaped illumination light, an illumination apparatus that uses such, an exposure apparatus, and the like. The variable slit apparatus for forming a slit-shaped illumination light comprises: a first light-shielding mechanism that comprises a plurality of blades for defining one long side of the illumination light; a second light-mechanism configured to define another long side of the illumination light; and a drive mechanism that changes the width of the illumination light in the latitudinal direction orthogonal to the longitudinal direction by driving the first light-shielding mechanism and the second light-shielding mechanism.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: February 15, 2011
    Assignee: Nikon Corporation
    Inventors: Eizo Ohya, Kyoji Nakamura, Yasushi Mizuno
  • Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
    Publication number: 20070014112
    Abstract: The present invention provides a variable slit apparatus, which can rapidly change the shape of the slit width of the illumination light while finely controlling the shape of the slit-shaped illumination light, an illumination apparatus that uses such, an exposure apparatus, and the like. The variable slit apparatus for forming a slit-shaped illumination light comprises: a first light-shielding mechanism that comprises a plurality of blades for defining one long side of the illumination light; a second light-mechanism configured to define another long side of the illumination light; and a drive mechanism that changes the width of the illumination light in the latitudinal direction orthogonal to the longitudinal direction by driving the first light-shielding mechanism and the second light-shielding mechanism.
    Type: Application
    Filed: May 10, 2006
    Publication date: January 18, 2007
    Applicant: Nikon Corporation
    Inventors: Eizo Ohya, Kyoji Nakamura, Yasushi Mizuno
  • Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method
    Patent number: 6727981
    Abstract: The illuminating optical system is divided into a first portion including movable blades moving during exposure, and a second portion not containing a movable portion moving over the movable blade during exposure. The second portion is installed on the exposure main portion, and the first portion, separately from the exposure main portion. The frames configuring the first and the second optical units, the second optical unit having optical elements of a smaller movable amount than the movable amount of the movable blades, are relatively displaceably connected via the bellows-shaped member. The frames configuring the second optical units are fixed to each other via the O-ring suppressing relative displacement. As a result, the effect of vibration of the illuminating optical system during exposure on the main portion can be reduced.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: April 27, 2004
    Assignee: Nikon Corporation
    Inventors: Taichi Taniuchi, Kyoji Nakamura, Eizo Ohya, Hiromitsu Yoshimoto
  • Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method
    Publication number: 20030117600
    Abstract: The illuminating optical system is divided into a first portion including movable blades moving during exposure, and a second portion not containing a movable portion moving over the movable blade during exposure. The second portion is installed on the exposure main portion, and the first portion, separately from the exposure main portion. The frames configuring the first and the second optical units, the second optical unit having optical elements of a smaller movable amount than the movable amount of the movable blades, are relatively displaceably connected via the bellows-shaped member. The frames configuring the second optical units are fixed to each other via the O-ring suppressing relative displacement. As a result, the effect of vibration of the illuminating optical system during exposure on the main portion can be reduced.
    Type: Application
    Filed: December 3, 2002
    Publication date: June 26, 2003
    Applicant: Nikon Corporation
    Inventors: Taichi Taniuchi, Kyoji Nakamura, Eizo Ohya, Hiromitsu Yoshimoto