Abstract: A substrate comprising: (i) a first series of blind vias into a thickness of a substrate and open to a first primary surface; and (ii) a second series of blind vias into the thickness of a substrate and open to a second primary surface. Each blind via includes an interior wall. The interior wall includes a first tapered region and a second tapered region. The first tapered region and the second tapered region have a distinct slope. Each of the blind vias of the second series of blind vias is coaxial with a different blind via of the first series of blind vias. Each blind via of the first series of blind vias has a depth that deviates from a mean depth by less than +/?10%. Each blind via of the second series of blind vias has a depth that deviates from a mean depth by less than +/?10%.

Abstract: An article includes a glass or glass-ceramic substrate having a first major surface and a second major surface opposite the first major surface, and at least one via extending through the substrate from the first major surface to the second major surface over an axial length in an axial dimension. The article also includes a metal connector disposed within the via that hermetically seals the via. The article has a helium hermeticity of less than or equal to 1.0×10?8 atm-cc/s after 1000 thermal shock cycles, each of the thermal shock cycle comprises cooling the article to a temperature of ?40° C. and heating the article to a temperature of 125° C., and the article has a helium hermeticity of less than or equal to 1.0×10?8 atm-cc/s after 100 hours of HAST at a temperature of 130° C. and a relative humidity of 85%.

Abstract: Disclosed herein is a bottom-up electrolytic via plating method wherein a first carrier substrate and a second substrate having at least one through-via are temporarily bonded together. The method includes applying a seed layer on a surface of the first substrate, forming a surface modification layer on the seed layer or the second substrate, bonding the second substrate to the first substrate with the surface modification layer to create an assembly wherein the seed layer and the surface modification layer are disposed between the first and second substrates, applying conductive material to the through-via, removing the second substrate having the through-via containing conductive material from the assembly.

Abstract: A method of making an antimicrobial glass article that includes the steps: submersing the article in a strengthening bath to exchange a portion of ion-exchangeable metal ions in the glass article with a portion of ion-exchanging metal ions in the strengthening bath to form a compressive stress layer extending from the first surface to a diffusion depth in the article; removing a portion of the compressive stress layer from the first surface of the article to a first depth above the diffusion depth in the article to define a new first surface and a remaining compressive stress layer; and submersing the article in an antimicrobial bath to exchange a portion of the ion-exchangeable and the ion-exchanging metal ions in the compressive stress layer with a portion of the silver metal ions in the antimicrobial bath to impart an antimicrobial property in the article.

Abstract: Described herein are various methods and manufacturing methods for making antimicrobial and strengthened, antimicrobial glass articles and substrates. The methods described herein generally include contacting the article with a KNO3-containing molten salt bath set at about 380 C to about 460 C for about 30 minutes to about 24 hours to form a compressive stress layer that extends inward from a surface of the glass substrate to a first depth; and contacting the article comprising the compressive stress layer with a AgNO3-containing molten salt bath set at about 300° C. to about 400° C. for about 5 minutes to about 18 hours to form an antimicrobial region that extends inward from the surface of the glass substrate to a second depth. The methods also include poisoning at least the AgNO3-containing molten salt bath and, in some cases, the KNO3-containing molten salt bath. Poisoning components include Na+ and Li+ ions.

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

Abstract: Articles including a glass-based substrate with holes, semiconductor packages including an article with holes, and methods of fabricating holes in a substrate are disclosed. In one embodiment, an article includes a glass-based substrate having a first surface, a second surface, and at least one hole extending from the first surface. The at least one hole has an interior wall having a surface roughness Ra that is less than or equal to 1 ?m. The at least one hole has a first opening having a first diameter that is present the first surface. A first plane is defined by the first surface of the glass-based substrate based on an average thickness of the glass-based substrate. A ratio of a depression depth to the first diameter of the at least one hole is less than or equal to 0.007.

Abstract: Disclosed is a glass-based article having a glass-based substrate including a first surface, a second surface opposing the first surface, at least one hole formed in the first surface, and a region under a compressive stress extending from the first surface to a depth of compression DOC?1#191 in the glass-based substrate, wherein the compressive stress in the region is greatest at the first surface. An electrically conductive material disposed in the at least one hole, wherein a cross-sectional area of the at least one hole and a cross-sectional area of the electrically conductive material differ by 0.1% or less.

Abstract: A method of making an antimicrobial glass article that includes the steps: submersing the article in a strengthening bath to exchange a portion of ion-exchangeable metal ions in the glass article with a portion of ion-exchanging metal ions in the strengthening bath to form a compressive stress layer extending from the first surface to a diffusion depth in the article; removing a portion of the compressive stress layer from the first surface of the article to a first depth above the diffusion depth in the article to define a new first surface and a remaining compressive stress layer; and submersing the article in an antimicrobial bath to exchange a portion of the ion-exchangeable and the ion-exchanging metal ions in the compressive stress layer with a portion of the silver metal ions in the antimicrobial bath to impart an antimicrobial property in the article.

Abstract: A method of making an antimicrobial glass article that includes the steps: submersing the article in a strengthening bath to exchange a portion of ion-exchangeable metal ions in the glass article with a portion of ion-exchanging metal ions in the strengthening bath to form a compressive stress layer extending from the first surface to a diffusion depth in the article; removing a portion of the compressive stress layer from the first surface of the article to a first depth above the diffusion depth in the article to define a new first surface and a remaining compressive stress layer; and submersing the article in an antimicrobial bath to exchange a portion of the ion-exchangeable and the ion-exchanging metal ions in the compressive stress layer with a portion of the silver metal ions in the antimicrobial bath to impart an antimicrobial property in the article.

Abstract: Articles including a glass-based substrate with holes, semiconductor packages including an article with holes, and methods of fabricating holes in a substrate are disclosed. In one embodiment, an article includes a glass-based substrate having a first surface, a second surface, and at least one hole extending from the first surface. The at least one hole has an interior wall having a surface roughness Ra that is less than or equal to 1 ?m. The at least one hole has a first opening having a first diameter that is present the first surface. A first plane is defined by the first surface of the glass-based substrate based on an average thickness of the glass-based substrate. A ratio of a depression depth to the first diameter of the at least one hole is less than or equal to 0.007.

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

Abstract: A method of making an antimicrobial article including the steps: providing an article having a first surface and ion-exchangeable metal ions, a strengthening bath comprising ion-exchanging metal ions larger in size than the ion-exchangeable metal ions, and an antimicrobial bath comprising antimicrobial ions, ion-exchangeable metal ions and ion-exchanging ions; submersing the article in the strengthening bath to exchange ion-exchangeable metal ions with ion-exchanging metal ions in the strengthening bath to form a compressive stress region extending from the first surface to a first depth; forming a layer on the first surface arranged over the compressive stress region and defining a second surface; and submersing the article and the layer in the antimicrobial bath to exchange ion-exchangeable and ion-exchanging metal ions in the compressive stress region with antimicrobial ions to impart an antimicrobial region with antimicrobial ions extending from the second surface of the layer to a second depth.

Abstract: Described herein are various methods and manufacturing methods for making antimicrobial and strengthened, antimicrobial glass articles and substrates. The methods described herein generally include contacting the article with a KNO3-containing molten salt bath set at about 380 C to about 460 C for about 30 minutes to about 24 hours to form a compressive stress layer that extends inward from a surface of the glass substrate to a first depth; and contacting the article comprising the compressive stress layer with a AgNO3-containing molten salt bath set at about 300° C. to about 400° C. for about 5 minutes to about 18 hours to form an antimicrobial region that extends inward from the surface of the glass substrate to a second depth. The methods also include poisoning at least the AgNO3-containing molten salt bath and, in some cases, the KNO3-containing molten salt bath. Poisoning components include Na+ and Li+ ions.

Abstract: A substrate ion exchange system, along with methods of maintain such a system, is provided that includes a substrate having an outer region containing a plurality of substrate metal ions, an ion exchange bath that includes a plurality of first metal ions at a first metal ion concentration and a plurality of second metal ions at a second metal ion concentration, and a vessel for containing the ion exchange bath and the substrate. The ion exchange system also includes a temperature sensor coupled to the vessel, and a processor configured to receive a vessel temperature from the sensor and to evaluate the first metal ion concentration based at least in part on a first metal ion consumption rate relationship and the vessel temperature. Further, the first metal ion consumption rate relationship is predetermined.

Abstract: Disclosed herein is a bottom-up electrolytic via plating method wherein a first carrier substrate and a second substrate having at least one through-via are temporarily bonded together. The method includes applying a seed layer on a surface of the first substrate, forming a surface modification layer on the seed layer or the second substrate, bonding the second substrate to the first substrate with the surface modification layer to create an assembly wherein the seed layer and the surface modification layer are disposed between the first and second substrates, applying conductive material to the through-via, removing the second substrate having the through-via containing conductive material from the assembly.

Abstract: A method of making an antimicrobial article including the steps: providing an article having a first surface and ion-exchangeable metal ions, a strengthening bath comprising ion-exchanging metal ions larger in size than the ion-exchangeable metal ions, and an antimicrobial bath comprising antimicrobial ions, ion-exchangeable metal ions and ion-exchanging ions; submersing the article in the strengthening bath to exchange ion-exchangeable metal ions with ion-exchanging metal ions in the strengthening bath to form a compressive stress region extending from the first surface to a first depth; forming a layer on the first surface arranged over the compressive stress region and defining a second surface; and submersing the article and the layer in the antimicrobial bath to exchange ion-exchangeable and ion-exchanging metal ions in the compressive stress region with antimicrobial ions to impart an antimicrobial region with antimicrobial ions extending from the second surface of the layer to a second depth.

Abstract: A method of making an antimicrobial glass article that includes the steps: submersing the article in a strengthening bath to exchange a portion of ion-exchangeable metal ions in the glass article with a portion of ion-exchanging metal ions in the strengthening bath to form a compressive stress layer extending from the first surface to a diffusion depth in the article; removing a portion of the compressive stress layer from the first surface of the article to a first depth above the diffusion depth in the article to define a new first surface and a remaining compressive stress layer; and submersing the article in an antimicrobial bath to exchange a portion of the ion-exchangeable and the ion-exchanging metal ions in the compressive stress layer with a portion of the silver metal ions in the antimicrobial bath to impart an antimicrobial property in the article.

Abstract: A substrate ion exchange system, along with methods of maintain such a system, is provided that includes a substrate having an outer region containing a plurality of substrate metal ions, an ion exchange bath that includes a plurality of first metal ions at a first metal ion concentration and a plurality of second metal ions at a second metal ion concentration, and a vessel for containing the ion exchange bath and the substrate. The ion exchange system also includes a temperature sensor coupled to the vessel, and a processor configured to receive a vessel temperature from the sensor and to evaluate the first metal ion concentration based at least in part on a first metal ion consumption rate relationship and the vessel temperature. Further, the first metal ion consumption rate relationship is predetermined.