Patents by Inventor Ekmini A. DeSilva

Ekmini A. DeSilva has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluoroalcohol containing molecular photoresist materials and processes of use
    Patent number: 8530136
    Abstract: Phenolic molecular glasses such as calixarenes include at least one fluoroalcohol containing unit. The fluoroalcohol containing molecular glasses can be used in photoresist compositions. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: September 10, 2013
    Assignee: International Business Machines Corporation
    Inventors: Luisa D. Bozano, Gregory Breyta, Ekmini A. DeSilva, William D. Hinsberg, Ratnam Sooriyakumaran, Linda K. Sundberg
  • Fluoroalcohol Containing Molecular Photoresist Materials and Processes of Use
    Publication number: 20120156611
    Abstract: Phenolic molecular glasses such as calixarenes include at least one fluoroalcohol containing unit. The fluoroalcohol containing molecular glasses can be used in photoresist compositions. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.
    Type: Application
    Filed: December 17, 2010
    Publication date: June 21, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Luisa D. Bozano, Gregory Breyta, Ekmini A. DeSilva, William D. Hinsberg, Ratnam Sooriyakumaran, Linda K. Sundberg