Patents by Inventor Elad Schleifer
Elad Schleifer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240085333Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: ApplicationFiled: August 18, 2023Publication date: March 14, 2024Applicant: NOVA LTD.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon YALOV, Gilad BARAK
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Publication number: 20240019375Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.Type: ApplicationFiled: September 14, 2021Publication date: January 18, 2024Applicant: NOVA LTD.Inventors: Eyal Hollander, Gilad BARAK, Elad Schleifer, Yonatan OREN, Amir Shayari
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Patent number: 11860104Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.Type: GrantFiled: August 1, 2022Date of Patent: January 2, 2024Assignee: NOVA LTDInventors: Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan Oren, Amir Shayari
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Publication number: 20230296436Abstract: Abstract: Systems and methods for metrology of workpieces such as wafers, using spectrometry of multi- spot- arrays formed over a test area of the tester workpiece, for optically measuring characteristics of the tested workpiece, where the optical metrology system is configured such that the distribution of energy density or flux of the multi-spot-array over the test area of the tested workpiece is such that prevents affecting the workpiece during its testing.Type: ApplicationFiled: July 5, 2021Publication date: September 21, 2023Applicant: NOVA LTD.Inventors: Yonatan OREN, Eyal Hollander, Elad Schleifer, Gilad BARAK
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Patent number: 11740183Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: GrantFiled: November 24, 2020Date of Patent: August 29, 2023Assignee: Nova Ltd.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon Yalov, Gilad Barak
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Publication number: 20230168200Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.Type: ApplicationFiled: August 1, 2022Publication date: June 1, 2023Applicant: NOVA LTD.Inventors: Eyal Hollander, Gilad BARAK, Elad Schleifer, Yonatan OREN, Amir Shayari
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Publication number: 20230044886Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.Type: ApplicationFiled: November 24, 2020Publication date: February 9, 2023Applicant: NOVA MEASURING INSTRUMENTS LTD.Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon YALOV, Gilad BARAK
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Publication number: 20220390858Abstract: Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.Type: ApplicationFiled: June 21, 2022Publication date: December 8, 2022Inventors: GILAD BARAK, MICHAEL CHEMAMA, SMADAR FERBER, YANIR HAINICK, BORIS LEVANT, ZE'EV LINDENFELD, DROR SHAFIR, YURI SHIRMAN, ELAD SCHLEIFER
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Patent number: 11415519Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.Type: GrantFiled: September 14, 2020Date of Patent: August 16, 2022Assignee: NOVA LTDInventors: Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan Oren, Amir Shayari
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Patent number: 11366398Abstract: Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.Type: GrantFiled: July 18, 2019Date of Patent: June 21, 2022Assignee: NOVA LTDInventors: Gilad Barak, Michael Chemama, Smadar Ferber, Yanir Hainick, Boris Levant, Ze'Ev Lindenfeld, Dror Shafir, Yuri Shirman, Elad Schleifer
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Publication number: 20210247699Abstract: Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.Type: ApplicationFiled: July 18, 2019Publication date: August 12, 2021Inventors: GILAD BARAK, MICHAEL CHEMAMA, SMADAR FERBER, YAIR HAINICK, BORIS LEVANT, ZE'EV LINDENFELD, DROR SHAFIR, YURI SHIRMAN, ELAD SCHLEIFER
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Publication number: 20210223179Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.Type: ApplicationFiled: September 14, 2020Publication date: July 22, 2021Applicant: NOVA MEASURING INSTRUMENTS LTD.Inventors: Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan OREN, Amir Shayari