Patents by Inventor Elaina Noelle Babayan

Elaina Noelle Babayan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for calibrating concentration sensors for precursor delivery
    Patent number: 11718912
    Abstract: Methods and apparatus for controlling precursor flow are provided. In embodiments, the methods and apparatus apparatus for controlling precursor flow to a deposition chamber, includes: an ampoule to output a precursor; a sensor assembly communicatively coupled to the ampoule; and a control system, wherein the control system is configured to calibrate the sensor assembly during flow of a precursor or a chemical standard through the sensor assembly.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: August 8, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sarah L. White, Elaina Noelle Babayan, Weize Hu
  • Methods and apparatus for calibrating concentration sensors for precursor delivery
    Patent number: 11668007
    Abstract: Methods and apparatus for controlling precursor flow are provided. In embodiments, the methods and apparatus apparatus for controlling precursor flow to a deposition chamber, includes: an ampoule to output a precursor; a sensor assembly communicatively coupled to the ampoule; and a control system, wherein the control system is configured to calibrate the sensor assembly during flow of a precursor or a chemical standard through the sensor assembly.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: June 6, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sarah L. White, Elaina Noelle Babayan, Weize Hu
  • METHODS AND APPARATUS FOR CALIBRATING CONCENTRATION SENSORS FOR PRECURSOR DELIVERY
    Publication number: 20210032751
    Abstract: Methods and apparatus for controlling precursor flow are provided. In embodiments, the methods and apparatus apparatus for controlling precursor flow to a deposition chamber, includes: an ampoule to output a precursor a sensor assembly communicatively coupled to the ampoule; and a control system, wherein the control system is configured to calibrate the sensor assembly during flow of a precursor or a chemical standard through the sensor assembly.
    Type: Application
    Filed: July 17, 2020
    Publication date: February 4, 2021
    Inventors: Sarah L. WHITE, Elaina Noelle BABAYAN, Weize HU
  • Floating high vacuum seal cartridge
    Patent number: 8939451
    Abstract: An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture in the process chamber, the central opening in the fixed seal housing and the second central opening in the floating seal cartridge. A first air bearing is created between the shaft and the floating seal cartridge in the second central opening. A second air bearing is created between the floating seal cartridge and the fixed seal housing. In this way, the floating seal cartridge is free to move with the shaft radially, while still maintaining a seal between the process chamber and the external environment.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: January 27, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Robert J. Mitchell, Elaina Noelle Babayan
  • FLOATING HIGH VACUUM SEAL CARTRIDGE
    Publication number: 20140252720
    Abstract: An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture in the process chamber, the central opening in the fixed seal housing and the second central opening in the floating seal cartridge. A first air bearing is created between the shaft and the floating seal cartridge in the second central opening. A second air bearing is created between the floating seal cartridge and the fixed seal housing. In this way, the floating seal cartridge is free to move with the shaft radially, while still maintaining a seal between the process chamber and the external environment.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 11, 2014
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Robert J. Mitchell, Elaina Noelle Babayan