Patents by Inventor Elaine A. Webb

Elaine A. Webb has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for etching high copper content aluminum films
    Patent number: 5350488
    Abstract: Aluminum alloys containing high amounts of copper can be etched to eliminate copper residues using boron trichloride and chlorine under etch conditions of low temperature, low pressure, high power and strict control of the amount of nitrogen present.
    Type: Grant
    Filed: December 10, 1992
    Date of Patent: September 27, 1994
    Assignee: Applied Materials, Inc.
    Inventor: Elaine A. Webb