Abstract: A packaged battery (60) is provided having a thin film lithium battery cell (62) sealed with a packaging foil or layer (67). The battery cell (60) includes a substrate (61) and an active cell (62) with an anode current collector (65) and a cathode current collector (64). The packaged battery is produced by heat sealing a packaging foil (67) to the exterior surfaces of the active cell (62).

Abstract: A packaged battery (60) is provided having a thin film lithium battery cell (62) sealed with a packaging foil or layer (67). The battery cell (60) includes a substrate (61) and an active cell (62) with an anode current collector (65) and a cathode current collector (64). The packaged battery is produced by heat sealing a packaging foil (67) to the exterior surfaces of the active cell (62).

Abstract: A packaged battery (60) is provided having a thin film lithium battery cell (62) sealed with a packaging foil or layer (67). The battery cell (60) includes a substrate (61) and an active cell (62) with an anode current collector (65) and a cathode current collector (64). The packaged battery is produced by heat sealing a packaging foil (67) to the exterior surfaces of the active cell (62).

Abstract: An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

Abstract: A process of producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The process is conducted with the use of a system (11) having a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

Abstract: An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

Abstract: A process of producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The process is conducted with the use of a system (11) having a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

Abstract: A rechargeable, thin film lithium battery cell (10) is provided having a supporting substrate (11), a cathode current collector (12), a cathode (13), a solid state electrolyte (14), an anode (15) and an anode current collector (17).

Abstract: A thin film battery having a protective package that provides a heat-resistant, hermetic seal for the thin film battery. A thin film battery includes thin film layers of components such as a cathode current collector, a cathode, an electrolyte, an anode, and an anode current collector built up on a substrate. Layers of dielectric material are positioned over the thin film battery. Suitable dielectric materials include aluminum oxide, silicon dioxide, silicon nitride, silicon carbide, tantalum oxide, diamond, and diamond-like-carbon. The dielectric materials are annealed. A layer of epoxy is positioned completely over all layers of the thin film battery and cured under ultraviolet light. Finally, the epoxy is annealed. The resultant thin film battery has a package that provides protection from the atmosphere, high temperatures, undesirable gases and can withstand processes utilized in the semiconductor and other industries to produce printed circuit boards with surface mounted thin film batteries.