Patents by Inventor Elfido Cross

Elfido Cross has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Parallel fault detection
    Publication number: 20040123182
    Abstract: A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
    Type: Application
    Filed: December 18, 2002
    Publication date: June 24, 2004
    Inventors: Elfido Cross, Ernest D. Adams, Robert J. Chong, Howard E. Castle, Thomas J. Sonderman, Alexander J. Pasadyn