Patents by Inventor Elie Benabou

Elie Benabou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quartz antenna with hollow conductor
    Patent number: 6376978
    Abstract: A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.
    Type: Grant
    Filed: March 6, 2000
    Date of Patent: April 23, 2002
    Assignee: The Regents of the University of California
    Inventors: Ka-Ngo Leung, Elie Benabou