Patents by Inventor Elisabeth Shanblatt

Elisabeth Shanblatt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Complex spatially-resolved reflectometry/refractometry
    Patent number: 11867626
    Abstract: Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light. Quantitative images yield spatially-dependent, local material information about a sample of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam of VUV wavelength or shorter is scattered off of a sample and imaged at various angles, wavelengths, and/or polarizations. The power of beam is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: January 9, 2024
    Assignee: Regents of the Univ of Colorado, a body corporate
    Inventors: Christina Porter, Daniel E. Adams, Michael Tanksalvala, Elisabeth Shanblatt, Margaret M. Murnane, Henry C. Kapteyn
  • Complex Spatially-Resolved Reflectometry/Refractometry
    Publication number: 20210325301
    Abstract: Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light. Quantitative images yield spatially-dependent, local material information about a sample of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam of VUV wavelength or shorter is scattered off of a sample and imaged at various angles, wavelengths, and/or polarizations. The power of beam is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.
    Type: Application
    Filed: April 12, 2021
    Publication date: October 21, 2021
    Inventors: Christina Porter, Daniel E. Adams, Michael Tanksalvala, Elisabeth Shanblatt, Margaret M. Murnane, Henry C. Kapteyn