Patents by Inventor Elizabeth Marsh

Elizabeth Marsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6904073
    Abstract: The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
    Type: Grant
    Filed: March 8, 2003
    Date of Patent: June 7, 2005
    Assignee: Cymer, Inc.
    Inventors: Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior, John Martin Algots, Matthew Ball, Alexander I. Ershov, Vladimir Fleurov, Walter D. Gillespie, Holger K. Glatzel, Leonard Lublin, Elizabeth Marsh, Richard G. Morton, Richard C. Ujazdowski, David J. Warkentin, R. Kyle Webb
  • Publication number: 20030219056
    Abstract: The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
    Type: Application
    Filed: March 8, 2003
    Publication date: November 27, 2003
    Inventors: Thomas A. Yager, William N. Partlo, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior, John Martin Algots, Matthew Ball, Alexander I. Ershov, Vladimir Fleurov, Walter D. Gillespie, Holger K. Glatzel, Leonard Lublin, Elizabeth Marsh, Richard G. Morton, Richard C. Ujazdowski, David J. Warkentin, R. Kyle Webb
  • Patent number: 4450969
    Abstract: A top-gate assembly adapted to be detachably or fixedly secured to selected portions of a standard bulk storage cart, said top-gate assembly including a plurality of protected springs connecting by a corresponding number of cables to a foot plate which is to be detachably secured to the cargo bed of said cart, thereby forming a gate therefor.
    Type: Grant
    Filed: November 9, 1981
    Date of Patent: May 29, 1984
    Inventors: William E. Marsh, Jr., deceased, by Elizabeth A. Marsh, executrix
  • Patent number: 4416463
    Abstract: A bulk storage cart comprising a base, opposing side walls and rear wall secured to said base, a top-gate assembly secured to said side walls and/or rear wall, said assembly including a plurality of protected springs connecting by a corresponding number of cables to a foot plate adapted to be detachably secured to said base, thereby forming a gate for said cart.
    Type: Grant
    Filed: November 6, 1981
    Date of Patent: November 22, 1983
    Inventors: William E. Marsh, Jr. deceased, Elizabeth A. Marsh, executrix