Patents by Inventor Elizabeth Mary STONE

Elizabeth Mary STONE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, substrate table, and non-uniform coating method
    Patent number: 11887881
    Abstract: A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: January 30, 2024
    Assignee: ASML HOLDING N.V.
    Inventors: Bruce Tirri, Ping Zhou, Elizabeth Mary Stone, David Hart Peterson, Mehmet Ali Akbas, Ryan Mayer, Richard Bryan Lewis
  • LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING METHOD
    Publication number: 20220216092
    Abstract: A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
    Type: Application
    Filed: April 21, 2020
    Publication date: July 7, 2022
    Applicant: ASML HOLDING N.V.
    Inventors: Bruce TIRRI, Ping ZHOU, Elizabeth Mary STONE, David Hart PETERSON, Mehmet Ali AKBAS, Ryan MAYER, Richard Bryan LEWIS