Abstract: The present invention is generally directed to methods and systems for converting tool processing ability based upon work in progress considerations. In one illustrative embodiment, the method includes identifying a plurality of wafers to be processed in one of a plurality of tools, identifying, on a collective basis, a number of different process operations to be performed in processing the wafers and a number of wafers to be processed in accordance with each of the different process operations, changing a processing ability of at least one of the tools based upon the number of wafers to be processed in accordance with the different process operations, and processing at least one of the wafers in at least one of the tools wherein the processing ability was changed.

Abstract: The present invention is generally directed to various methods and systems for scheduling maintenance procedures based upon workload distribution. In one illustrative embodiment, the method includes providing a tool, identifying a planned processing schedule for processing a plurality of wafer lots in the tool, and providing a controller that schedules a time for a maintenance procedure to be performed on the tool based upon the planned processing schedule of the plurality of wafer lots.

Abstract: Several different embodiments of a troubleshooting method are described. In one embodiment, an alarm data image is provided (e.g., to a user). The alarm data image may be displayed upon on a display screen visible by the user. The alarm data image includes an image indicative of a problem (e.g., an abnormal condition or faulty state of a processing or metrology tool). Information indicative of a class in which the problem resides is used to access a corresponding portion of a troubleshooting guide (TSG). The corresponding portion of the TSG includes one or more symptom images, wherein each symptom image includes an image indicative of a symptom of the class in which the problem resides. Each symptom image has a corresponding corrective action. A selected one of the symptom images is selected (e.g., by the user). Where the selecting is performed by the user, the user may select one of the symptom images the user believes most closely resembles the alarm data image.