Patents by Inventor Elke Gehring

Elke Gehring has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for determining trench parameters
    Patent number: 7773232
    Abstract: An apparatus includes an evaluating unit and a peak detection unit. The peak detection unit is configured to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise trench structures. The evaluation unit is configured to determine from the at least one peak parameter and from a correction value containing information about an effective refractive index of the sample, a trench parameter of the trench structures.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: August 10, 2010
    Assignee: Qimonda AG
    Inventors: Peter Weidner, Alexander Kasic, Elke Gehring
  • Apparatus and Method for Determining Trench Parameters
    Publication number: 20080297765
    Abstract: An apparatus includes an evaluating unit and a peak detection unit. The peak detection unit may be configured to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise trench structures. The evaluation unit may be configured to determine from the at least one peak parameter and from a correction value containing information about an effective refractive index of the sample, a trench parameter of the trench structures.
    Type: Application
    Filed: May 30, 2007
    Publication date: December 4, 2008
    Applicant: Qimonda AG
    Inventors: Peter Weidner, Alexander Kasic, Elke Gehring