Patents by Inventor Ellart Meijer

Ellart Meijer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and patterning device transport
    Publication number: 20050286041
    Abstract: The invention relates to a box for transporting lithographic patterning device, the box being arranged to cooperate with a lithographic apparatus. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also comprises a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box. The invention also relates to a lithographic apparatus configured to cooperate with the transport box.
    Type: Application
    Filed: June 24, 2004
    Publication date: December 29, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Erik Ham, Robert Gabriel Lansbergen, Ellart Meijer, Hendricus Johannes Meijer, Hans Meiling, Bastiaan Mertens, Johannes Hubertus Moors, Gert-Jan Heerens