Patents by Inventor Ellen Claus

Ellen Claus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for increasing adhesion of metallization layers by providing dummy vias
    Patent number: 7611991
    Abstract: By providing dummy vias below electrically non-functional metal regions, the risk for metal delamination in subsequent processes may be significantly reduced. Moreover, in some embodiments, the mechanical strength of the resulting metallization layers may be even more enhanced by providing dummy metal regions, which may act as anchors for an overlying non-functional metal region. In addition, dummy vias may also be provided in combination with electrically functional metal lines and regions, thereby also enhancing the mechanical stability and the electrical performance thereof.
    Type: Grant
    Filed: September 5, 2006
    Date of Patent: November 3, 2009
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ralf Richter, Matthias Schaller, Ellen Claus, Eckhard Langer
  • TECHNIQUE FOR INCREASING ADHESION OF METALLIZATION LAYERS BY PROVIDING DUMMY VIAS
    Publication number: 20070123009
    Abstract: By providing dummy vias below electrically non-functional metal regions, the risk for metal delamination in subsequent processes may be significantly reduced. Moreover, in some embodiments, the mechanical strength of the resulting metallization layers may be even more enhanced by providing dummy metal regions, which may act as anchors for an overlying non-functional metal region. In addition, dummy vias may also be provided in combination with electrically functional metal lines and regions, thereby also enhancing the mechanical stability and the electrical performance thereof.
    Type: Application
    Filed: September 5, 2006
    Publication date: May 31, 2007
    Inventors: Ralf Richter, Matthias Schaller, Ellen Claus, Eckhard Langer