Patents by Inventor Ellen Torack

Ellen Torack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for controlling temperatures in an epitaxial reactor
    Patent number: 10007255
    Abstract: A method for controlling temperatures in an epitaxial reactor for use in a wafer-production process is provided. The method is implemented by a computing device coupled to a memory. The method includes transmitting, to a heating device in a first zone of the epitaxial reactor, an output power instruction representing a base output power. The method additionally includes determining an actual time period for a temperature in the first zone of the epitaxial reactor to reach a target temperature, determining a difference between the actual time period and a reference time period, determining an output power offset based on the difference, and storing the output power offset in the memory in association with the heating device.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: June 26, 2018
    Assignee: SunEdison Semiconductor Limited (UEN201334164H)
    Inventors: Benno Orschel, Arash Abedijaberi, Gang Wang, Ellen Torack
  • SYSTEMS AND METHODS FOR CONTROLLING TEMPERATURES IN AN EPITAXIAL REACTOR
    Publication number: 20150378372
    Abstract: A method for controlling temperatures in an epitaxial reactor for use in a wafer-production process is provided. The method is implemented by a computing device coupled to a memory. The method includes transmitting, to a heating device in a first zone of the epitaxial reactor, an output power instruction representing a base output power. The method additionally includes determining an actual time period for a temperature in the first zone of the epitaxial reactor to reach a target temperature, determining a difference between the actual time period and a reference time period, determining an output power offset based on the difference, and storing the output power offset in the memory in association with the heating device.
    Type: Application
    Filed: June 27, 2014
    Publication date: December 31, 2015
    Inventors: Benno Orschel, Arash Abedijaberi, Gang Wang, Ellen Torack