Patents by Inventor Ellis Craig Hayford

Ellis Craig Hayford has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Removable liners for charged particle beam systems
    Patent number: 7897939
    Abstract: A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
    Type: Grant
    Filed: July 3, 2008
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Alan Michael Chandler, Tushar Desai, Ellis Craig Hayford, Nicholas Mone, Jr., James Spiros Nakos
  • Removable liners for charged particle beam systems
    Patent number: 7897940
    Abstract: An apparatus. The apparatus including: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Alan Michael Chandler, Tushar Desai, Ellis Craig Hayford, Nicholas Mone, Jr., James Spiros Nakos
  • Removable liners for charged particle beam systems
    Patent number: 7462845
    Abstract: A method of improving the performance of a charged beam apparatus. The method including: providing a chamber having an interior surface; providing a pump port for evacuating the chamber; providing a substrate holder within the chamber; forming a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and placing one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: December 9, 2008
    Assignee: International Business Machines Corporation
    Inventors: Alan Michael Chandler, Tushar Desai, Ellis Craig Hayford, Nicholas Mone, Jr., James Spiros Nakos
  • REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS
    Publication number: 20080277597
    Abstract: An apparatus. The apparatus including: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
    Type: Application
    Filed: July 7, 2008
    Publication date: November 13, 2008
    Inventors: Alan Michael Chandler, Tushar Desai, Ellis Craig Hayford, Nicholas Mone, Jr., James Spiros Nakos
  • REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS
    Publication number: 20080258081
    Abstract: A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
    Type: Application
    Filed: July 3, 2008
    Publication date: October 23, 2008
    Inventors: Alan Michael Chandler, Tushar Desai, Ellis Craig Hayford, Nicholas Mone, James Spiros Nakos