Patents by Inventor Elma Weber

Elma Weber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8154000
    Abstract: The invention is directed to an arrangement for generating EUV radiation based on a hot plasma using liquid emitter material. The object of the invention is to find a novel possibility for generating EUV radiation which allows a continuous supply of liquid, particularly metal, emitter material (2) under a defined high pressure without having to interrupt the continuous supply of emitter material (2) when consumed emitter material (2) must be replenished.
    Type: Grant
    Filed: May 4, 2010
    Date of Patent: April 10, 2012
    Assignee: XTREME technologies GmbH
    Inventors: Guido Hergenhan, Diethard Kloepfel, Todd Byrnes, Elma Weber, Mike Möritz
  • Publication number: 20100282987
    Abstract: The invention is directed to an arrangement for generating EUV radiation based on a hot plasma using liquid emitter material. The object of the invention is to find a novel possibility for generating EUV radiation which allows a continuous supply of liquid, particularly metal, emitter material (2) under a defined high pressure without having to interrupt the continuous supply of emitter material (2) when consumed emitter material (2) must be replenished.
    Type: Application
    Filed: May 4, 2010
    Publication date: November 11, 2010
    Applicant: XTREME TECHNOLOGIES GMBH
    Inventors: Guido Hergenhan, Diethard Kloepfel, Todd Byrnes, Elma Weber, Mike Möritz