Patents by Inventor Elmar Cullman

Elmar Cullman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lens array photolithography
    Patent number: 6016185
    Abstract: An apparatus and method for photolithographic exposure of a substrate including an illumination source for providing light for producing an image on the substrate, a mask including a pattern for projection onto the substrate, a lens assembly for projecting the light through a plurality of lens channels onto the substrate and an actuator for moving the lens assembly in a plane parallel to the mask and the substrate for suppressing interference effects.
    Type: Grant
    Filed: October 23, 1997
    Date of Patent: January 18, 2000
    Assignee: Hugle Lithography
    Inventors: Elmar Cullman, Reinhard Volkel, Karin M. Wells