Abstract: A device for protecting electrode holders in CVD reactors includes an electrode suitable for accommodating a filament rod on an electrode holder which includes an electrically conductive material and is installed in a recess of a bottom plate, wherein an intermediate space between an electrode holder and a bottom plate is sealed by means of a sealing material, and the sealing material is protected by a protective body which is made up of one or more parts and is arranged in a ring-like manner around the electrodes, and the height of the protective body increases at least in sections in the direction of the electrode holder.

Abstract: The present invention relates to an apparatus for converting electrical energy for conductively heating rod-shaped semiconductor materials. The apparatus is particularly useful to control the temperature of electrically heated rods in the Siemens process for deposition of silicon by chemical vapor deposition.