Patents by Inventor Elmer Lacsamana

Elmer Lacsamana has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing a MEMS device
    Publication number: 20060027522
    Abstract: A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.
    Type: Application
    Filed: August 9, 2004
    Publication date: February 9, 2006
    Inventors: John Martin, Manolo Mena, Elmer Lacsamana, Michael Duffy, William Webster, Lawrence Felton, Maurice Karpman