Patents by Inventor Eltsafon Ashwal-Island

Eltsafon Ashwal-Island has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Accuracy improvements in optical metrology
    Patent number: 11862522
    Abstract: Methods, metrology modules and target designs are provided, which improve the accuracy of metrology measurements. Methods provide flexible handling of multiple measurement recipes and setups and enable relating them to landscape features that indicate their relation to resonance regions and to flat regions. Clustering of recipes, self-consistency tests, common processing of aggregated measurements, noise reduction, cluster analysis, detailed analysis of the landscape and targets with skewed cells are employed separately or in combination to provide cumulative improvements of measurement accuracy.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: January 2, 2024
    Inventors: Barak Bringoltz, Evgeni Gurevich, Ido Adam, Yoel Feler, Dror Alumot, Yuval Lamhot, Noga Sella, Yaron De Leeuw, Tal Yaziv, Eltsafon Ashwal-Island, Lilach Saltoun, Tom Leviant
  • ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
    Publication number: 20210175132
    Abstract: Methods, metrology modules and target designs are provided, which improve the accuracy of metrology measurements. Methods provide flexible handling of multiple measurement recipes and setups and enable relating them to landscape features that indicate their relation to resonance regions and to flat regions. Clustering of recipes, self-consistency tests, common processing of aggregated measurements, noise reduction, cluster analysis, detailed analysis of the landscape and targets with skewed cells are employed separately or in combination to provide cumulative improvements of measurement accuracy.
    Type: Application
    Filed: February 18, 2021
    Publication date: June 10, 2021
    Inventors: Barak Bringoltz, Evgeni Gurevich, Ido Adam, Yoel Feler, Dror Alumot, Yuval Lamhot, Noga Sella, Yaron De Leeuw, Tal Yaziv, Eltsafon Ashwal-Island, Lilach Saltoun, Tom Leviant