Patents by Inventor Elwood J. Egerton

Elwood J. Egerton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11609122
    Abstract: The present disclosure is a infrared sensor capable of being integrated into a IR focal plane array. It includes of a CMOS based readout circuit with preamplification, noise filtering, and row/column address control. Using either a microbolometer device structure with either a thermal sensing element of vanadium oxide or amorphous silicon, a nanocomposite is fabricated on top of either of these materials comprising aligned or unaligned carbon nanotube films with IR trans missive layer of silicon nitride followed by one to five monolayers of graphene. These layers are connected in series minimizing the noise sources and enhancing the NEDT of each film. The resulting IR sensor is capable of NEDT of less than 1 mK. The wavelength response is from 2 to 12 microns. The approach is low cost using a process that takes advantage of the economies of scale of wafer level CMOS.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: March 21, 2023
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Ashok K. Sood, Elwood J. Egerton
  • Patent number: 11404643
    Abstract: Ultraviolet (UV), Terahertz (THZ) and Infrared (IR) radiation detecting and sensing systems using graphene nanoribbons and methods to making the same. In an illustrative embodiment, the detector includes a substrate, single or multiple layers of graphene nanoribbons, and first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. Absorption over a wide wavelength range of 200 nm to 1 mm are possible based on the two alternative devices structures described within. These two device types are a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules. The second device structure consists of a graphene nanoribbon layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: August 2, 2022
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 11340108
    Abstract: The use of silicon or vanadium oxide nanocomposite consisting of graphene deposited on top of an existing amorphous silicon or vanadium oxide microbolometer can result in a higher sensitivity IR detector. An IR bolometer type detector consisting of a thermally isolated nano-sized (<one micron feature size) electro-mechanical structure comprised of Si3N4, SiO2 thins films, suspended over a cavity with a copper thin film reflecting surface is described. On top of the suspended thin film is a nanostructure composite comprised of graphene monolayers, covered with various surface densities of VoXy or amorphous nanoparticles, followed by another graphene layer. The two conducting legs are connected to a readout integrated circuit (ROIC) fabricated on a CMOS wafer underneath. The nanostructure is fabricated after the completion of the ROIC process and is integrate able with the CMOS process.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: May 24, 2022
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 10983010
    Abstract: The present disclosure is an infrared sensor capable of being integrated into a IR focal plane array. It includes of a CMOS based readout circuit with preamplification, noise filtering, and row/column address control. Using either a microbolometer device structure with either a thermal sensing element of vanadium oxide or amorphous silicon, a nanocomposite is fabricated on top of either of these materials comprising aligned or unaligned carbon nanotube films with IR transmissive layer of silicon nitride followed by one to five monolayers of graphene. These layers are connected in series minimizing the noise sources and enhancing the NEDT of each film. The resulting IR sensor is capable of NEDT of less than 1 mK. The wavelength response is from 2 to 12 microns. The approach is low cost using a process that takes advantage of the economies of scale of wafer level CMOS.
    Type: Grant
    Filed: May 28, 2019
    Date of Patent: April 20, 2021
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Ashok K. Sood, Elwood J. Egerton
  • Patent number: 10937914
    Abstract: Radiation detecting and sensing systems using graphene and methods of making the same are provided; including a substrate, a single or multiple layers of graphene nanoribbons, first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance, increasing sensitivity to IR radiation. Absorption over a wide wavelength range (200 nm to 1 mm) is possible based on the three alternative devices structures described within. Devices can variously include (a) a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules, (b) graphene layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector, and/or (c) tuned graphene layers layered on top of each other where a p-type layer and a n-type layer is created using a combination of oxidation and doping.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: March 2, 2021
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 10788364
    Abstract: The use of silicon or vanadium oxide nanocomposite consisting of graphene deposited on top of an existing amorphous silicon or vanadium oxide microbolometer can result in a higher sensitivity IR detector. An IR bolometer type detector consisting of a thermally isolated nano-sized (<one micron feature size) electro-mechanical structure comprised of Si3N4, SiO2 thins films, suspended over a cavity with a copper thin film reflecting surface is described. On top of the suspended thin film is a nanostructure composite comprised of graphene monolayers, covered with various surface densities of VoXy or amorphous nanoparticles, followed by another graphene layer. The two conducting legs are connected to a readout integrated circuit (ROIC) fabricated on a CMOS wafer underneath. The nanostructure is fabricated after the completion of the ROIC process and is integrate able with the CMOS process.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: September 29, 2020
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 10593883
    Abstract: Ultraviolet (UV), Terahertz (THZ) and Infrared (IR) radiation detecting and sensing systems using graphene nanoribbons and methods to making the same. In an illustrative embodiment, the detector includes a substrate, single or multiple layers of graphene nanoribbons, and first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. Absorption over a wide wavelength range of 200 nm to 1 mm are possible based on the two alternative devices structures described within. These two device types are a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules. The second device structure consists of a graphene nanoribbon layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: March 17, 2020
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 10345143
    Abstract: The use of silicon or vanadium oxide nanocomposite consisting of graphene deposited on top of an existing amorphous silicon or vanadium oxide microbolometer can result in a higher sensitivity IR detector. An IR bolometer type detector consisting of a thermally isolated nano-sized (<one micron feature size) electro-mechanical structure comprised of Si3N4, SiO2 thins films, suspended over a cavity with a copper thin film reflecting surface is described. On top of the suspended thin film is a nanostructure composite comprised of graphene monolayers, covered with various surface densities of VoXy or amorphous nanoparticles, followed by another graphene layer. The two conducting legs are connected to a readout integrated circuit (ROIC) fabricated on a CMOS wafer underneath. The nanostructure is fabricated after the completion of the ROIC process and is integrate able with the CMOS process.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: July 9, 2019
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 10302498
    Abstract: The present disclosure is an infrared sensor capable of being integrated into a IR focal plane array. It includes of a CMOS based readout circuit with preamplification, noise filtering, and row/column address control. Using either a microbolometer device structure with either a thermal sensing element of vanadium oxide or amorphous silicon, a nanocomposite is fabricated on top of either of these materials comprising aligned or unaligned carbon nanotube films with IR transmissive layer of silicon nitride followed by one to five monolayers of graphene. These layers are connected in series minimizing the noise sources and enhancing the NEDT of each film. The resulting IR sensor is capable of NEDT of less than 1 mK. The wavelength response is from 2 to 12 microns. The approach is low cost using a process that takes advantage of the economies of scale of wafer level CMOS.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: May 28, 2019
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Ashok K. Sood, Elwood J. Egerton
  • Patent number: 10297700
    Abstract: Radiation detecting and sensing systems using graphene and methods of making the same are provided; including a substrate, a single or multiple layers of graphene nanoribbons, first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance, increasing sensitivity to IR radiation. Absorption over a wide wavelength range (200 nm to 1 mm) is possible based on the three alternative devices structures described within. Devices can variously include (a) a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules, (b) graphene layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector, and/or (c) tuned graphene layers layered on top of each other where a p-type layer and a n-type layer is created using a combination of oxidation and doping.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: May 21, 2019
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 9947824
    Abstract: A solar cell employing nanocrystalline superlattice material and amorphous structure and method of constructing the same provides improved efficiency when converting sunlight to power. The photovoltaic (PV) solar cell includes an intrinsic superlattice material deposited between the p-doped layer and the n-doped layer. The superlattice material is comprised of a plurality of sublayers which effectively create a graded band gap and multi-band gap for the superlattice material. The sublayers can include a nanocrystalline Si:H layer, an amorphous SiGe:H layer and an amorphous SiC:H layer. Varying the thickness of each layer results in an effective energy gap that is graded as desired for improved efficiency. Methods of constructing single junction and parallel configured two junction solar cells include depositing the various layers on a substrate such as stainless steel or glass.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: April 17, 2018
    Assignee: Magnolia Solar, Inc.
    Inventors: Gopal G. Pethuraja, Roger E. Welser, Elwood J. Egerton, Ashok K. Sood
  • Patent number: 9945720
    Abstract: The use of silicon or vanadium oxide nanocomposite consisting of graphene deposited on top of an existing amorphous silicon or vanadium oxide microbolometer can result in a higher sensitivity IR detector. An IR bolometer type detector consisting of a thermally isolated nano-sized (<one micron feature size) electro-mechanical structure comprised of Si3N4, SiO2 thins films, suspended over a cavity with a copper thin film reflecting surface is described. On top of the suspended thin film is a nanostructure composite comprised of graphene monolayers, covered with various surface densities of VoXy or amorphous nanoparticles, followed by another graphene layer. The two conducting legs are connected to a readout integrated circuit (ROIC) fabricated on a CMOS wafer underneath. The nanostructure is fabricated after the completion of the ROIC process and is integrate able with the CMOS process.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: April 17, 2018
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 9851257
    Abstract: The present disclosure is a infrared sensor capable of being integrated into a IR focal plane array. It includes of a CMOS based readout circuit with preamplification, noise filtering, and row/column address control. Using either a microbolometer device structure with either a thermal sensing element of vanadium oxide or amorphous silicon, a nanocomposite is fabricated on top of either of these materials comprising aligned or unaligned carbon nanotube films with IR trans missive layer of silicon nitride followed by one to five monolayers of graphene. These layers are connected in series minimizing the noise sources and enhancing the NEDT of each film. The resulting IR sensor is capable of NEDT of less than 1 mK. The wavelength response is from 2 to 12 microns. The approach is low cost using a process that takes advantage of the economies of scale of wafer level CMOS.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: December 26, 2017
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Ashok K. Sood, Elwood J. Egerton
  • Patent number: 9677946
    Abstract: The present disclosure relates to microbolometer structures having top layers of amorphous silicon or vanadium oxide. In some examples, combinations of carbon nanotubes, nanoparticles, and/or thin films can be deposited atop the existing top layer of amorphous silicon or top layer of vanadium oxide of a microbolometer structure. Such configurations can increase the sensitivity of the microbolometers to less than 4 mK, less than 2 mK, and in some examples less than 1 mK.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: June 13, 2017
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 9525136
    Abstract: Ultraviolet (UV), Terahertz (THZ) and Infrared (IR) radiation detecting and sensing systems using graphene nanoribbons and methods to making the same. In an illustrative embodiment, the detector includes a substrate, single or multiple layers of graphene nanoribbons, and first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. Absorption over a wide wavelength range of 200 nm to 1 mm are possible based on the two alternative devices structures described within. These two device types are a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules. The second device structure consists of a graphene nanoribbon layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: December 20, 2016
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 9196766
    Abstract: Radiation detecting and sensing systems using graphene and methods of making the same are provided; including a substrate, a single or multiple layers of graphene nanoribbons, first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance, increasing sensitivity to IR radiation. Absorption over a wide wavelength range (200 nm to 1 mm) is possible based on the three alternative devices structures described within. Devices can variously include (a) a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules, (b) graphene layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector, and/or (c) tuned graphene layers layered on top of each other where a p-type layer and a n-type layer is created using a combination of oxidation and doping.
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: November 24, 2015
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 8969711
    Abstract: A solar cell employing nanocrystalline superlattice material and amorphous structure and method of constructing the same provides improved efficiency when converting sunlight to power. The photovoltaic (PV) solar cell includes an intrinsic superlattice material deposited between the p-doped layer and the n-doped layer. The superlattice material is comprised of a plurality of sublayers which effectively create a graded band gap and multi-band gap for the superlattice material. The sublayers can include a nanocrystalline Si:H layer, an amorphous SiGe:H layer and an amorphous SiC:H layer. Varying the thickness of each layer results in an effective energy gap that is graded as desired for improved efficiency. Methods of constructing single junction and parallel configured two junction solar cells include depositing the various layers on a substrate such as stainless steel or glass.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: March 3, 2015
    Assignee: Magnolia Solar, Inc.
    Inventors: Gopal G. Pethuraja, Roger E. Welser, Elwood J. Egerton, Ashok K. Sood
  • Patent number: 8916825
    Abstract: Ultraviolet (UV), Terahertz (THZ) and Infrared (IR) radiation detecting and sensing systems using graphene nanoribbons and methods to making the same. In an illustrative embodiment, the detector includes a substrate, single or multiple layers of graphene nanoribbons, and first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. Absorption over a wide wavelength range of 200 nm to 1 mm are possible based on the two alternative devices structures described within. These two device types are a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules. The second device structure consists of a graphene nanoribbon layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: December 23, 2014
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood
  • Patent number: 8816706
    Abstract: Methods for using carbon nanomaterials to alter the operational output of a device are described herein. The methods can include providing a device that contains a carbon nanomaterial in a first state, and applying an input stimulus to the carbon nanomaterial so as to change the first state into a second state. In the first state, the carbon nanomaterial can be used to produce a normal operational output of the device, whereas the device can produce an altered operational output when the carbon nanomaterial is in the second state. When producing an altered operational output, the device can continue operating, but the altered operational output can be non-indicative of the true operational state of the device. Devices containing a carbon nanomaterial that can be reconfigured from a normal operational output to an altered operational output are also described herein.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: August 26, 2014
    Assignee: Lockheed Martin Corporation
    Inventors: Jonathan W. Ward, Brent M. Segal, Elwood J. Egerton
  • Patent number: 8455828
    Abstract: Infrared (IR) radiation detecting and sensing systems using aligned or bundled carbon nanotubes and methods to making the same. In certain embodiments of the invention, it includes a substrate, aligned or bundled carbon nanotubes, first and second conducting interconnects each in electrical communication with the nanotubes. Bundled nanotubes can be tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. In addition bundled nanotubes are independent of Nyquist frequency limitations found in other IR sensors because of the lack of 1/f or flicker noise sources. These detectors can be fabricated on CMOS foundry wafers resulting in large format focal planes greater than 1000×1000 and pixel sizes only limited by photolithographic technologies. The increase in temperature coefficient of resistance claimed within results in IR detectors capable of NEDT of less than 10 mK at low cost.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: June 4, 2013
    Assignee: Magnolia Optical Technologies, Inc.
    Inventors: Elwood J. Egerton, Ashok K. Sood