Patents by Inventor Emanuel Beer
Emanuel Beer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8327878Abstract: Methods and apparatus for grounding a chamber isolation valve for a processing system are provided. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.Type: GrantFiled: December 11, 2008Date of Patent: December 11, 2012Assignee: Applied Materials, Inc.Inventors: Ke Ling Lee, Shinichi Kurita, Emanuel Beer
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Patent number: 8033772Abstract: A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.Type: GrantFiled: March 21, 2006Date of Patent: October 11, 2011Assignee: Applied Materials, Inc.Inventors: Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Wendell T. Blonigan
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Patent number: 7919972Abstract: A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.Type: GrantFiled: January 18, 2008Date of Patent: April 5, 2011Assignee: Applied Materials, Inc.Inventors: Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Benjamin Johnston, Fayez E. Abboud
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Patent number: 7847566Abstract: A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.Type: GrantFiled: November 15, 2007Date of Patent: December 7, 2010Assignee: Applied Materials, Inc.Inventors: Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin Johnston, Paul Bocian, Emanuel Beer
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Publication number: 20090122099Abstract: Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.Type: ApplicationFiled: January 15, 2009Publication date: May 14, 2009Applicant: APPLIED MATERIALS, INC.Inventors: John M. White, Emanuel Beer, Hongbin Ji, Chang-Tsung Lin, Shinichi Kurita
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Publication number: 20090090883Abstract: Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.Type: ApplicationFiled: December 11, 2008Publication date: April 9, 2009Applicant: Applied Materials, Inc.Inventors: Ke Ling Lee, Shinichi Kurita, Emanuel Beer
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Patent number: 7499767Abstract: In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.Type: GrantFiled: November 21, 2006Date of Patent: March 3, 2009Assignee: Applied Materials, Inc.Inventors: Shinichi Kurita, Emanuel Beer
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Patent number: 7469715Abstract: A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.Type: GrantFiled: July 1, 2005Date of Patent: December 30, 2008Assignee: Applied Materials, Inc.Inventors: Ke Ling Lee, Shinichi Kurita, Emanuel Beer
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Publication number: 20080291228Abstract: According to the present invention, multiple rows of nozzles within a print head may be arranged proximal to and offset from each other to facilitate inkjet printing. Print heads may comprise a single row of nozzles or may comprise a plurality of rows of nozzles. Each row of nozzles may be situated such that the immediately adjacent row of nozzles may be offset by a predetermined distance. In some embodiments, adjacent rows of nozzles may each print with the same color. In this way, adjacent offset rows of nozzles may be used in combination to dispense ink drops into sub-pixel wells in improved patterns and with improved ink distribution within the sub-pixel well. These offset print techniques may also enable tighter grouping of ink drops within a sub-pixel well and enable faster printing operations.Type: ApplicationFiled: May 21, 2007Publication date: November 27, 2008Inventors: JOHN M. WHITE, Fan-Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak, Inchen Huang, Emanuel Beer
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Publication number: 20080111577Abstract: A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.Type: ApplicationFiled: January 18, 2008Publication date: May 15, 2008Inventors: Shinichi Kurita, Emanuel Beer, Hung Nguyen, Benjamin Johnston, Fayez Abboud
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Patent number: 7372250Abstract: A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.Type: GrantFiled: February 19, 2004Date of Patent: May 13, 2008Assignee: Applied Materials, Inc.Inventors: Shinichi Kurita, Emanuel Beer, Edgar Kehrberg, Matthias Brunner
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Patent number: 7355418Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.Type: GrantFiled: July 30, 2004Date of Patent: April 8, 2008Assignee: Applied Materials, Inc.Inventors: Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez E. Abboud, Benjamin Johnston, Paul Bocian, Emanuel Beer
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Publication number: 20080061807Abstract: A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.Type: ApplicationFiled: November 15, 2007Publication date: March 13, 2008Inventors: Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) Abboud, Benjamin Johnston, Paul Bocian, Emanuel Beer
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Patent number: 7330021Abstract: A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.Type: GrantFiled: December 21, 2004Date of Patent: February 12, 2008Assignee: Applied Materials, Inc.Inventors: Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Benjamin Johnston, Fayez E. Abboud
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Patent number: 7319335Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.Type: GrantFiled: July 12, 2004Date of Patent: January 15, 2008Assignee: Applied Materials, Inc.Inventors: Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin Johnston, Paul Bocian, Emanuel Beer
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Patent number: 7208047Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.Type: GrantFiled: December 15, 2003Date of Patent: April 24, 2007Assignee: Applied Materials, Inc.Inventors: Emanuel Beer, Kenneth E. Baumel
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Publication number: 20070070099Abstract: A sensor apparatus for an inkjet printing device is provided. The sensor apparatus may include 1) at least one print head adapted to deposit ink on a top surface of a substrate, wherein the substrate is in motion relative to the print head, 2) at least one sensor adapted to detect the distance of the at least one sensor from the top surface of the substrate, and 3) a controller adapted to determine the substrate to nozzle distance based on the distance of the sensor to the top surface of the substrate, and adjust the trajectory of the ink being deposited on the substrate based on the substrate to nozzle distance. Numerous other aspects are provided.Type: ApplicationFiled: September 28, 2006Publication date: March 29, 2007Inventors: Emanuel Beer, Chang Lin, Shinichi Kurita, Quanyuan Shang, Benjamin Johnston
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Publication number: 20070073443Abstract: In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.Type: ApplicationFiled: November 21, 2006Publication date: March 29, 2007Inventors: Shinichi Kurita, Emanuel Beer
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Publication number: 20070070109Abstract: Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.Type: ApplicationFiled: September 29, 2005Publication date: March 29, 2007Inventors: John White, Emanuel Beer, Hongbin Ji, Chang Lin, Shinichi Kurita
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Publication number: 20070000608Abstract: A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.Type: ApplicationFiled: July 1, 2005Publication date: January 4, 2007Inventors: Ke Lee, Shinichi Kurita, Emanuel Beer