Abstract: A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative. The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.

Abstract: A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative. The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.

Abstract: A head suspension 31 has a piezoelectric element 13 that deforms in response to a voltage applied thereto, a base plate 33 having an attaching part to which the piezoelectric element 13 is attached, and a load beam 35 having a flexure 39. A front end of the load beam 35 moves in a sway direction according to the deformation of the piezoelectric element 13. The head suspension 31 includes adhesives that attach the piezoelectric element 13 to the attaching part. The adhesives are applied to and hardened at the attaching part one by one. At least one of the adhesives that is first applied to and hardened at the attaching part is electrically insulative. The head suspension 31 properly maintains electric insulation between the piezoelectric element 13 and the attaching part, sufficiently demonstrates original functions, and secures a rigidity balance and proper vibration characteristic.

Abstract: A spin coating device for a substrate, in which a uniform thin film can be formed by applying an application liquid to a substrate and the quality of the substrate can be further improved. The spin coating device for a substrate comprises a turntable 2 for holding and rotating a substrate 1; an application liquid supply means 4 for supplying an application liquid 3 to the rotating substrate 1: splash preventing means 20, which are arranged at the periphery of the substrate 1 held by the turntable 2, prevent the droplets of the application liquid from splashing and provide with an opening portion 10 for circulating the flow A of external air in an area ranging from the central portion toward the peripheral portion of the substrate 1 held by the turntable 2. Exhaust means 8 and 9 for exhausting air from within the splash preventing means 20 are provided.