Patents by Inventor Emile M. Bellott

Emile M. Bellott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for conducting electron beam lithography
    Patent number: 4454200
    Abstract: Plasma etch durability of polymeric resists used in electron beam lithography is improved by vapor phase impregnation with an aromatic compound after development of an image. The aromatic compound should possess a polarity similar to the polymeric resist and should be relatively volatile to facilitate vapor phase diffusion.
    Type: Grant
    Filed: March 3, 1983
    Date of Patent: June 12, 1984
    Assignee: Varian Associates, Inc.
    Inventor: Emile M. Bellott, Jr.