Patent number: 9583667
Abstract: Systems and methods for forming solar cells with CuInSe2 and Cu(In,Ga)Se2 films are provided. In one embodiment, a method comprises: during a first stage (220), performing a mass transport through vapor transport of an indium chloride (InClx) vapor (143, 223) and Se vapor (121, 225) to deposit a semiconductor film (212, 232, 252) upon a substrate (114, 210, 230, 250); heating the substrate (114, 210, 230, 250) and the semiconductor film to a desired temperature (112); during a second stage (240) following the first stage (220), performing a mass transport through vapor transport of a copper chloride (CuClx) vapor (143, 243) and Se vapor (121, 245) to the semiconductor film (212, 232, 252); and during a third stage (260) following the second stage (240), performing a mass transport through vapor transport of an indium chloride (InClx) vapor (143, 263) and Se vapor (121, 265) to the semiconductor film (212, 232, 252).
Type:
Grant
Filed:
February 27, 2013
Date of Patent:
February 28, 2017
Assignees:
Alliance for Sustainable Energy, LLC, Abengoa Solar New Technologies, S.A.
Inventors:
David S. Albin, Nirav Vora, Sebastian Caparros Jimenez, Joaquin Murillo Gutierrez, Emilio Sanchez Cortezon, Manuel Romero