Patents by Inventor Emily Hwang

Emily Hwang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FACTORY LEVEL AND TOOL LEVEL ADVANCED PROCESS CONTROL SYSTEMS INTEGRATION IMPLEMENTATION
    Publication number: 20070038326
    Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.
    Type: Application
    Filed: July 27, 2006
    Publication date: February 15, 2007
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gary Behm, Emily Hwang, Yue Li, Teresita Magtoto