Patents by Inventor Emily Schooley

Emily Schooley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EM source for enhanced plasma control
    Patent number: 11692262
    Abstract: Apparatus and methods for controlling plasma profiles during PVD deposition processes are disclosed. Some embodiments utilize EM coils placed above the target to control the plasma profile during deposition.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: July 4, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Alexander Jansen, Keith A. Miller, Prashanth Kothnur, Martin Riker, David Gunther, Emily Schooley
  • EM SOURCE FOR ENHANCED PLASMA CONTROL
    Publication number: 20220341029
    Abstract: Apparatus and methods for controlling plasma profiles during PVD deposition processes are disclosed. Some embodiments utilize EM coils placed above the target to control the plasma profile during deposition.
    Type: Application
    Filed: July 11, 2022
    Publication date: October 27, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Alexander Jansen, Keith A. Miller, Prashanth Kothnur, Martin Riker, David Gunther, Emily Schooley
  • EM SOURCE FOR ENHANCED PLASMA CONTROL
    Publication number: 20210017639
    Abstract: Apparatus and methods for controlling plasma profiles during PVD deposition processes are disclosed. Some embodiments utilize EM coils placed above the target to control the plasma profile during deposition.
    Type: Application
    Filed: July 16, 2020
    Publication date: January 21, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Alexander Jansen, Keith A. Miller, Prashanth Kothnur, Martin Riker, David Gunther, Emily Schooley