Abstract: An extreme ultraviolet (EUV) light source is provided. The EUV light source comprises a spray nozzle array having a plurality of spray nozzles configured to spray a plurality of rows of droplets to an irradiating position; a laser source configured to generate a first laser beam and a second laser beam and cause the first laser beam and the second laser beam to alternately bombard the rows of droplets to generate EUV light with increased output power; a focusing mirror having at least two first sub-focusing mirrors and at least two second sub-focusing mirrors; and a first driving device having at least two first sub-driving device and at least two second sub-driving device, each of first driving devices driving one of the first sub-focusing mirrors and each of the second sub-driving devices driving one of the second sub-focusing mirrors.

Abstract: An extreme ultraviolet (EUV) light source is provided. The EUV light source comprises a spray nozzle array having a plurality of spray nozzles configured to spray a plurality of rows of droplets to an irradiating position; a laser source configured to generate a first laser beam and a second laser beam and cause the first laser beam and the second laser beam to alternately bombard the rows of droplets to generate EUV light with increased output power; a focusing mirror having at least two first sub-focusing mirrors and at least two second sub-focusing mirrors; and a first driving device having at least two first sub-driving device and at least two second sub-driving device, each of first driving devices driving one of the first sub-focusing mirrors and each of the second sub-driving devices driving one of the second sub-focusing mirrors.

Abstract: EUVL light source systems and methods are provided. A laser or a high-voltage-discharge device is used to excite EUV light source material to generate EUV light along with droplets flying out of the EUV light source material. A collector is positioned to guide the EUV light into a desired direction. A cooling assembly is configured to wrap around the collector along the EUV light in the desired direction. At least a first portion of the plurality of molten droplets reaches and condenses on a surface of the cooling assembly.

Abstract: EUVL light source systems and methods are provided. A laser or a high-voltage-discharge device is used to excite EUV light source material to generate EUV light along with droplets flying out of the EUV light source material. A collector is positioned to guide the EUV light into a desired direction. A cooling assembly is configured to wrap around the collector along the EUV light in the desired direction. At least a first portion of the plurality of molten droplets reaches and condenses on a surface of the cooling assembly.

Abstract: An apparatus for detecting flashback occurrences in a premixed combustor system having at least one fuel nozzle includes at least one photodetector and at least one fiber optic element coupled between the at least one photodetector and a test region of the combustor system wherein a respective flame of the fuel nozzle is not present under normal operating conditions. A signal processor monitors a signal of the photodetector. The fiber optic element can include at least one optical fiber positioned within a protective tube. The fiber optic element can include two fiber optic elements coupled to the test region. The optical fiber and the protective tube can have lengths sufficient to situate the photodetector outside of an engine compartment.

Abstract: A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

Abstract: A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

Abstract: A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

Abstract: A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

Abstract: A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

Abstract: A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

Abstract: An apparatus for detecting flashback occurrences in a premixed combustor system having at least one fuel nozzle includes at least one photodetector and at least one fiber optic element coupled between the at least one photodetector and a test region of the combustor system wherein a respective flame of the fuel nozzle is not present under normal operating conditions. A signal processor monitors a signal of the photodetector. The fiber optic element can include at least one optical fiber positioned within a protective tube. The fiber optic element can include two fiber optic elements coupled to the test region. The optical fiber and the protective tube can have lengths sufficient to situate the photodetector outside of an engine compartment.

Abstract: A technique for measuring and selectively adjusting a clearance between a stationary object and desirably a rotating object includes a non-contact, sensing system having a sensor attachable to the stationary object, a mask having a predetermined sized viewport or aperture that sets or limits the sensing or operation of the sensor, and a controller. The sensor is operable for sensing within a field of view a portion of the rotating object and generating a signal in response thereto. The field of view varies in response to varying the clearance between the sensor and the second object. Desirably, the portion of the second object includes a varying pattern. The controller is operable to determine the clearance between the first object and the second object in response to the signal. In another embodiment, sensing system is operable to adjust the clearance by controller providing an electrical current to a resistive heating element in the thermally expandable portion of a plurality of segmented labyrinth seals.

Abstract: A technique for measuring and selectively adjusting a clearance between a stationary object and desirably a rotating object includes a non-contact, sensing system having a sensor attachable to the stationary object, a mask having a predetermined sized viewport or aperture that sets or limits the sensing or operation of the sensor, and a controller. The sensor is operable for sensing within a field of view a portion of the rotating object and generating a signal in response thereto. The field of view varies in response to varying the clearance between the sensor and the second object. Desirably, the portion of the second object includes a varying pattern. The controller is operable to determine the clearance between the first object and the second object in response to the signal. In another embodiment, sensing system is operable to adjust the clearance by controller providing an electrical current to a resistive heating element in the thermally expandable portion of a plurality of segmented labyrinth seals.

Abstract: A technique for measuring and selectively adjusting a clearance between a stationary object and desirably a rotating object includes a non-contact, sensing system having a sensor attachable to the stationary object, a mask having a predetermined sized viewport or aperture that sets or limits the sensing or operation of the sensor, and a controller. The sensor is operable for sensing within a field of view a portion of the rotating object and generating a signal in response thereto. The field of view varies in response to varying the clearance between the sensor and the second object. Desirably, the portion of the second object includes a varying pattern. The controller is operable to determine the clearance between the first object and the second object in response to the signal. In another embodiment, sensing system is operable to adjust the clearance by controller providing an electrical current to a resistive heating element in the thermally expandable portion of a plurality of segmented labyrinth seals.

Abstract: An apparatus for detecting flashback occurrences in a premixed combustor system having at least one fuel nozzle includes at least one photodetector and at least one fiber optic element coupled between the at least one photodetector and a test region of the combustor system wherein a respective flame of the fuel nozzle is not present under normal operating conditions. A signal processor monitors a signal of the photodetector. The fiber optic element can include at least one optical fiber positioned within a protective tube. The fiber optic element can include two fiber optic elements coupled to the test region. The optical fiber and the protective tube can have lengths sufficient to situate the photodetector outside of an engine compartment.

Abstract: A method for detecting misalignment of initially-aligned fiber filaments in a composite. An optical fiber is placed among the fiber filaments in the composite, light is directed into the optical fiber, the intensity of the light in the optical fiber is measured during subsequent composite processing, and attenuation in such light intensity is ascertained which indicates such misalignment (e.g., wrinkling, bending, buckling, porosity, delamination and the like) is being detected during such processing. In another preferred method, before-processing and after-processing x-ray images are taken of an x-ray-attenuating fiber which has been placed among x-ray-transparent fiber filaments in a composite.