Abstract: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

Abstract: Object tracking using image segmentation is disclosed. A captured image of a specimen is obtained. A segmented image is generated based on the captured image. The segmented image indicates segments corresponding to objects of interest. One or more target objects are identified from the objects of interest in the segmented image. Objects of interest most similar, in position and/or shape, to target objects shown in a previous image may be identified. Alternatively, objects of interest that are associated with connecting vectors most similar to the connecting vectors that connect the target objects in a previous image may be identified. A movement vector is drawn from a target object position in the previous image to a target object position in the segmented image. A field of view of the microscope is moved, with respect to the specimen, according to the movement vector to capture another image of the specimen.

Abstract: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.