Abstract: A microfluidic system comprising a pneumatic or an hydraulic pinch valve. The pinch valve comprises: a microfluidic channel defined in a compliant body; an inflatable control channel cooperating with a valve section of the microfluidic channel such that pneumatic or hydraulic pressurization of the control channel causes inflation of the control channel and pinching closure of the valve section. The microfluidic system comprises an on-chip MEMS pump in fluidic communication with the control channel for pressurizing said control channel.

Abstract: A microfluidic system.

Abstract: A microfluidic system comprising a MEMS integrated circuit bonded to a microfluidics platform. The microfluidics platform comprises a polymeric body having at least one microfluidic channel defined therein. The MEMS integrated circuit comprises at least one thermal bend actuator. The microfluidic system is configured such that movement of the actuator causes closure of the channel.

Abstract: A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve.

Abstract: A microfluidic pinch valve. The valve comprises a microfluidic channel defined in a compliant body; a valve sleeve defined by a section of the microfluidic channel, the valve sleeve having a membrane wall defining part of an outer surface of the body; a compression member for pinching the membrane wall against an opposed wall of the valve sleeve; and a thermal bend actuator for moving the compression member between a closed position in which the membrane wall is sealingly pinched against the opposed wall, and an open position in which the membrane wall is disengaged from the opposed wall.

Abstract: A printhead integrated circuit comprises a substrate having drive circuitry and a plurality of nozzle assemblies positioned on the substrate. Each nozzle assembly has a moving portion moveable relative to a stationary portion for ejection of ink. The printhead integrated circuit is covered with a polymeric layer. The polymeric layer covers a gap defined between each moving portion and each stationary portion.

Abstract: A method of fabricating a plurality of MEMS integrated circuits from a wafer having a MEMS layer formed on a frontside thereof and a polymer coating over said MEMS layer, said polymer coating having a plurality of frontside dicing streets defined therethrough, said method comprising the steps of: (a) releasably attaching a first holding means to said polymer coating; and (b) performing at least one operation on a backside of the wafer, said at least one operation including etching a plurality of backside dicing streets through the wafer, each backside dicing street meeting with a respective frontside dicing street, thereby providing the plurality of MEMS integrated circuits releasably attached to said first holding means, wherein each MEMS integrated circuit comprises a respective polymer coating.

Abstract: An inkjet printhead comprising a plurality of nozzle assemblies is provided. Each nozzle assembly has a moving portion for ejection of ink. The printhead includes a seal membrane joining the moving portions to the printhead.

Abstract: An inkjet printer comprising: a printhead comprising a plurality of nozzles for ejecting ink from an ink ejection face of said printhead; and a capper comprising a perimeter seal and a resiliently deformable capper body having a capping surface, said capper being moveable between a first position in which said capper is disengaged from said printhead; a second position in which said perimeter seal sealingly engages with said ink ejection face, such that a sealed air cavity is defined between said capping surface and said printhead; and a third position in which deformation of said capper body urges said capping surface into sealing engagement with said ink ejection face, wherein, in moving from said second position to said third position, said air cavity is compressed and air from said cavity is forced into said nozzles, thereby causing ink to retreat into said printhead.

Abstract: An inkjet printer comprising: a printhead comprising a nozzle plate having a plurality of nozzle openings defined therein, said nozzle plate comprising a first relatively hydrophilic layer and a second relatively hydrophobic layer, said second layer defining an ink ejection face for said printhead; and a capper having a planar capping surface, said capper being moveable between a first position in which said capper is disengaged from said printhead and a second position in which said capping surface sealingly engages with said ink ejection face wherein, in said second position, a meniscus of ink contained in each nozzle opening is pinned at an interface between said first and second layers, such that a microwell is defined between said capping surface and said meniscus.

Abstract: A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) depositing a hydrophobic polymeric layer onto the nozzle surface; (c) depositing a protective metal film onto at least the polymeric layer; (d) depositing a sacrificial material onto the polymeric layer; (e) patterning the sacrificial material to define a plurality of nozzle opening regions; (f) defining a plurality of nozzle openings through the metal film, the polymeric layer and the nozzle plate; (g) subjecting the printhead to an oxidizing plasma; and (h) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face.

Abstract: A printhead having a hydrophobic ink ejection face is provided. At least part of the ink ejection face is coated with a hydrophobic polymeric material selected from the group comprising: polymerized siloxanes and fluorinated polyolefins.

Abstract: A method of fabricating a plurality of MEMS integrated circuits from a wafer having a MEMS layer formed on a frontside thereof and a polymer coating over said MEMS layer, said polymer coating having a plurality of frontside dicing streets defined therethrough, said method comprising the steps of: (a) releasably attaching a first holding means to said polymer coating; and (b) performing at least one operation on a backside of the wafer, said at least one operation including etching a plurality of backside dicing streets through the wafer, each backside dicing street meeting with a respective frontside dicing street, thereby providing the plurality of MEMS integrated circuits releasably attached to said first holding means, wherein each MEMS integrated circuit comprises a respective polymer coating.

Abstract: A method of fabricating a printhead having a hydrophobic ink ejection face is provided. The method comprises the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face; (b) depositing a layer of relatively hydrophobic polymeric material onto the nozzle surface, the polymeric material being resistant to removal by ashing; and (c) defining a plurality of nozzle openings in the nozzle surface, thereby providing a printhead having a relatively hydrophobic ink ejection face. Steps (b) and (c) may be performed in any order.

Abstract: An inkjet printhead comprising a plurality of nozzle assemblies is provided. Each nozzle assembly has a moving portion for ejection of ink. The printhead includes a seal membrane joining the moving portions to the printhead.

Abstract: A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) defining a plurality of nozzle openings in the nozzle plate; (c) depositing a hydrophobic polymeric layer onto the nozzle surface; (d) depositing a protective metal film onto the polymeric layer; (e) subjecting the printhead to an oxidizing plasma; and (f) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face. Step (b) may be performed immediately after any of steps (a), (c) or (d).

Abstract: A nozzle assembly for an inkjet printhead is provided. The nozzle assembly comprises a nozzle chamber having a roof, the roof having a moving portion moveable relative to a static portion and a nozzle opening defined in the roof, such that movement of the moving portion relative to the static portion causes ejection of ink through the nozzle opening. The nozzle assembly also comprises an actuator for moving the moving portion relative to the static portion, and a mechanical seal interconnecting the moving portion and the static portion. The mechanical seal comprises a polymeric material selected from the group comprising: polymerized siloxanes and fluorinated polyolefins.

Abstract: A thermal bend actuator, having a plurality of elements, is provided. The actuator comprises a first active element for connection to drive circuitry a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. The first element is comprised of an aluminium alloy.