Abstract: Method for the fabrication of Haze noise standards having, respectively, an insulating thin layer and a plurality of nano-structures of hemi-spherical form on the insulating thin layer, with the respective standards being fabricated by: the formation on at least one insulating layer of seeds made of a first semi-conductor material by chemical deposition from a first precursor gas for the first semi-conductor material, formation on the insulating layer of nano-structures based on a second semi-conductor material and in the form of hemi-spheres, from stable seeds of the first semi-conductor material, by chemical deposition from a second precursor gas of the second semi-conductor material. The invention also relates to a calibration method using standards obtained by means of such a method.

Abstract: The invention relates to a method for the fabrication of Haze noise standards having, respectively, an insulating thin layer (102, 202) and a plurality of nano-structures (114, 116, 214, 216) of hemi-spherical form on the insulating thin layer, with the respective standards being fabricationd by: the formation on at least one insulating layer (102, 202) of seeds (106, 107) made of a first semi-conductor material by chemical deposition from a first precursor gas (104) for the first semi-conductor material, formation on the insulating layer (102, 202) of nano-structures (114, 116, 2141, 2142, 2143, 2144) based on a second semi-conductor material and in the form of hemi-spheres, from stable seeds of the first semi-conductor material, by chemical deposition from a second precursor gas (110) of the second semi-conductor material. The invention also relates to a calibration method using standards obtained by means of such a method.