Abstract: An injector (1), which is produced from silicon and allows gas to be introduced into process chambers in processes, in particular processes in semiconductor technology, is proposed. The injector (1) is formed as a tube (2), which if appropriate consists of at least two pieces of tube (10) and in which outlet openings for the gas to be introduced into the process chamber are provided. At least one channel (4) is provided in the tube (2) that serves as an injector (1). The profile of the tube (2) serving as the injector (1) is unround, and therefore deviates from a circular profile, with elongated, triangular or star-shaped forms being possible options.

Abstract: A device (1) for irradiating titanium-dioxide-coated fibers with UV radiation includes a housing (2) that is filled with water. Bodies (4), including strips (5), which consist of quartz glass, are arranged in the housing (2). LEDs (7), which emit UV radiation, are paired with at least one of the longitudinal edges of the strips (5). UV radiation is uniformly emitted to the fibers by the strips (5), so that these fibers acquire anti-fouling properties.

Abstract: A device (1) for irradiating titanium-dioxide-coated fibers with UV radiation includes a housing (2) that is filled with water. Bodies (4), including strips (5), which consist of quartz glass, are arranged in the housing (2). LEDs (7), which emit UV radiation, are paired with at least one of the longitudinal edges of the strips (5). UV radiation is uniformly emitted to the fibers by the strips (5), so that these fibers acquire anti-fouling properties.