Patents by Inventor Enzo Kuo

Enzo Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for monitoring the operation of a wafer handling robot
    Patent number: 6871115
    Abstract: The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.
    Type: Grant
    Filed: October 11, 2002
    Date of Patent: March 22, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Kuo-Liang Huang, Enzo Kuo, Patrick Chen, Yuan-Chich Lin, Chih-Yi Lai, Chun-Hung Liu
  • Method and apparatus for monitoring the operation of a wafer handling robot
    Publication number: 20040073336
    Abstract: The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.
    Type: Application
    Filed: October 11, 2002
    Publication date: April 15, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Liang Huang, Enzo Kuo, Patrick Chen, Yuan-Chich Lin, Chih-Yi Lai, Chun-Hung Liu