Abstract: An apparatus and a method for generating extreme ultra violet radiation are provided. The apparatus for generating extreme ultra violet radiation includes a light source, a first reflecting mirror on which source light emitted from the light source is incident, a second reflecting mirror on which first reflected light reflected by the first reflecting mirror is incident, a focus mirror on which second reflected light reflected by the second reflecting mirror is incident, the focus mirror reflecting third reflected light back to the second reflecting mirror, and a gas cell on which fourth reflected light reflected by the second reflecting mirror is incident.

Abstract: An extreme ultra violet (EUV) generation device includes a light source for outputting laser beam, a pulse width compression system for compressing a pulse width of the laser beam, a gas cell for receiving the laser beam having the compressed pulse width incident from the pulse width compression system and generating EUV light, and a vacuum chamber housing the pulse width compression system and the gas cell.

Abstract: An apparatus and a method for generating extreme ultra violet radiation are provided. The apparatus for generating extreme ultra violet radiation includes a light source, a first reflecting mirror on which source light emitted from the light source is incident, a second reflecting mirror on which first reflected light reflected by the first reflecting mirror is incident, a focus mirror on which second reflected light reflected by the second reflecting mirror is incident, the focus mirror reflecting third reflected light back to the second reflecting mirror, and a gas cell on which fourth reflected light reflected by the second reflecting mirror is incident.

Abstract: The present invention relates to an optical frequency synthesizer and an optical frequency synthesizing method using femtosecond laser optical injection locking, which inject a femtosecond laser optical frequency comb into a diode laser, thus obtaining single-mode laser light, phase-locked to only a single mode in the optical frequency comb, and which change the optical frequency and interval, that is, the repetition rate, of a femtosecond laser, together with the frequency of a semiconductor laser, thus scanning optical frequencies while realizing a single desired optical frequency. The optical frequency synthesizer using femtosecond laser optical injection locking, includes a mode-locked femtosecond laser (110), which is a master laser, and a diode laser (120), which is a slave laser and into which laser light emitted from the femtosecond laser is injected.

Abstract: The present invention relates to an optical frequency synthesizer and an optical frequency synthesizing method using femtosecond laser optical injection locking, which inject a femtosecond laser optical frequency comb into a diode laser, thus obtaining single-mode laser light, phase-locked to only a single mode in the optical frequency comb, and which change the optical frequency and interval, that is, the repetition rate, of a femtosecond laser, together with the frequency of a semiconductor laser, thus scanning optical frequencies while realizing a single desired optical frequency. The optical frequency synthesizer using femtosecond laser optical injection locking, includes a mode-locked femtosecond laser (110), which is a master laser, and a diode laser (120), which is a slave laser and into which laser light emitted from the femtosecond laser is injected.