Patents by Inventor Eric A. Husdon

Eric A. Husdon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WIGGLING CONTROL FOR PSEUDO-HARDMASK
    Publication number: 20120214310
    Abstract: A method for etching features in an etch layer. A conditioning for a patterned pseudo-hardmask of amorphous carbon or polysilicon disposed over the etch layer is provided, where the conditioning comprises providing a fluorine free deposition gas comprising a hydrocarbon gas, forming a plasma from the fluorine free deposition gas, providing a bias less than 500 volts, and forming a deposition on top of the patterned pseudo-hardmask. The etch layer is etched through the patterned pseudo-hardmask.
    Type: Application
    Filed: February 17, 2011
    Publication date: August 23, 2012
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Ben-Li Sheu, Rajinder Dhindsa, Vinay Pohray, Eric A. Husdon, Andrew D. Bailey, III